发明申请
- 专利标题: Multiple-gate transistors formed on bulk substrates
- 专利标题(中): 形成在大量衬底上的多栅极晶体管
-
申请号: US11645419申请日: 2006-12-26
-
公开(公告)号: US20070102763A1公开(公告)日: 2007-05-10
- 发明人: Yee-Chia Yeo , Fu-Liang Yang , Chenming Hu
- 申请人: Yee-Chia Yeo , Fu-Liang Yang , Chenming Hu
- 主分类号: H01L27/12
- IPC分类号: H01L27/12
摘要:
In one aspect, the present invention teaches a multiple-gate transistor 130 that includes a semiconductor fin 134 formed in a portion of a bulk semiconductor substrate 132. A gate dielectric 144 overlies a portion of the semiconductor fin 134 and a gate electrode 146 overlies the gate dielectric 144. A source region 138 and a drain region 140 are formed in the semiconductor fin 134 oppositely adjacent the gate electrode 144. In the preferred embodiment, the bottom surface 150 of the gate electrode 146 is lower than either the source-substrate junction 154 or the drain-substrate junction 152.
公开/授权文献
- US07863674B2 Multiple-gate transistors formed on bulk substrates 公开/授权日:2011-01-04
信息查询
IPC分类: