Invention Application
- Patent Title: Methods and apparatus for generating a mask
- Patent Title (中): 用于产生掩模的方法和装置
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Application No.: US11256885Application Date: 2005-10-24
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Publication No.: US20070103685A1Publication Date: 2007-05-10
- Inventor: Kevin Harding , Xiaoping Qian , Russell DeMuth
- Applicant: Kevin Harding , Xiaoping Qian , Russell DeMuth
- Assignee: General Electric Company
- Current Assignee: General Electric Company
- Main IPC: G01B11/00
- IPC: G01B11/00

Abstract:
A method for generating a mask for use with a light measurement system that includes a light source for projecting light onto a surface of an object, and an imaging system for receiving light reflected from the surface of the object. The method includes determining a profile of the object to be inspected, and generating a mask based on the determined profile, wherein the mask includes an opening extending therethrough that has a profile that substantially matches a profile of the object as viewed from the light source.
Public/Granted literature
- US07336374B2 Methods and apparatus for generating a mask Public/Granted day:2008-02-26
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