公开(公告)号：US07301165B2

公开(公告)日：2007-11-27

申请号：US11256904

申请日：2005-10-24

Applicant: Qingying Hu ,  Kevin George Harding ,  Joseph Benjamin Ross ,  Xiaoping Qian

Inventor： Qingying Hu ,  Kevin George Harding ,  Joseph Benjamin Ross ,  Xiaoping Qian

IPC: G01N21/88 ,  G01N21/86 ,  G01V8/00

CPC classification number: G01B11/25 ,  F01D21/003 ,  F01D25/00 ,  G01N21/21 ,  G01N21/55 ,  G01N21/8806 ,  G01N21/9515 ,  G01N2201/0635

Abstract: A method for inspecting an object using a structured light measurement system that includes a light source for projecting light onto a surface of the object and an imaging sensor for receiving light reflected from the object. The method includes determining a position of at least one of the light source and the imaging sensor with respect to the object based on at least one of a three-dimensional model of the object and a three-dimensional model of the structured light measurement system.

公开(公告)号：US20070103685A1

公开(公告)日：2007-05-10

申请号：US11256885

申请日：2005-10-24

Applicant: Kevin Harding ,  Xiaoping Qian ,  Russell DeMuth

Inventor： Kevin Harding ,  Xiaoping Qian ,  Russell DeMuth

IPC: G01B11/00

CPC classification number: G01B11/2513

Abstract: A method for generating a mask for use with a light measurement system that includes a light source for projecting light onto a surface of an object, and an imaging system for receiving light reflected from the surface of the object. The method includes determining a profile of the object to be inspected, and generating a mask based on the determined profile, wherein the mask includes an opening extending therethrough that has a profile that substantially matches a profile of the object as viewed from the light source.

Abstract translation: 一种用于产生用于光测量系统的掩模的方法，所述光测量系统包括用于将光投射到物体的表面上的光源，以及用于接收从物体表面反射的光的成像系统。 该方法包括确定待检查对象的轮廓，以及基于所确定的轮廓来生成掩模，其中所述掩模包括延伸穿过其中的开口，所述开口具有与从所述光源观察的物体的轮廓基本一致的轮廓。

公开(公告)号：US20050068532A1

公开(公告)日：2005-03-31

申请号：US10673598

申请日：2003-09-29

Applicant: Xiaoping Qian ,  Kevin Harding

Inventor： Xiaoping Qian ,  Kevin Harding

IPC: G01N21/55 ,  G01B11/25 ,  G01N21/21 ,  G01J4/00

CPC classification number: G01B11/25 ,  G01N21/21 ,  G01N2201/0635

Abstract: The present disclosure provides for an optical metrology system for scanning an object (106) having a shiny surface. The optical metrology system includes at least one light source (102) configured and adapted to emit a structured light pattern (L) against the surface of the object, at least one first polarizer (108) disposed between the light source and the object such that the light pattern passes therethrough, the first polarizer being configured and adapted to vary at least one of the plane of polarization and the polarization angle of the light pattern, at least one camera (124a-124c) configured and adapted to take images of the object, and at least one second polarizer disposed between the camera and the object, the second polarizer having a fixed orientation.

Abstract translation: 本公开提供了一种用于扫描具有光泽表面的物体（106）的光学测量系统。 光学测量系统包括至少一个光源（102），其配置并适于发射抵靠物体表面的结构化光图案（L），设置在光源和物体之间的至少一个第一偏振器（108），使得 所述光图案通过其中，所述第一偏振器被配置和适于改变所述光图案的偏振面和所述偏振角中的至少一个，至少一个相机（124a-124c）被配置并适于拍摄所述物体的图像 以及设置在相机和物体之间的至少一个第二偏振器，第二偏振器具有固定的取向。

公开(公告)号：US07336374B2

公开(公告)日：2008-02-26

申请号：US11256885

申请日：2005-10-24

Applicant: Kevin George Harding ,  Xiaoping Qian ,  Russell Stephen DeMuth

Inventor： Kevin George Harding ,  Xiaoping Qian ,  Russell Stephen DeMuth

IPC: G01B11/00

CPC classification number: G01B11/2513

Abstract: A method for generating a mask for use with a light measurement system that includes a light source for projecting light onto a surface of an object, and an imaging system for receiving light reflected from the surface of the object. The method includes determining a profile of the object to be inspected, and generating a mask based on the determined profile, wherein the mask includes an opening extending therethrough that has a profile that substantially matches a profile of the object as viewed from the light source.

Abstract translation: 一种用于产生用于光测量系统的掩模的方法，所述光测量系统包括用于将光投射到物体的表面上的光源，以及用于接收从物体表面反射的光的成像系统。 该方法包括确定待检查对象的轮廓，以及基于所确定的轮廓来生成掩模，其中所述掩模包括延伸穿过其中的开口，所述开口具有与从所述光源观察的物体的轮廓基本一致的轮廓。

公开(公告)号：US20070090309A1

公开(公告)日：2007-04-26

申请号：US11256904

申请日：2005-10-24

Applicant: Qingying Hu ,  Kevin Harding ,  Joseph Ross ,  Xiaoping Qian

Inventor： Qingying Hu ,  Kevin Harding ,  Joseph Ross ,  Xiaoping Qian

IPC: G01N21/88

CPC classification number: G01B11/25 ,  F01D21/003 ,  F01D25/00 ,  G01N21/21 ,  G01N21/55 ,  G01N21/8806 ,  G01N21/9515 ,  G01N2201/0635

Abstract: A method for inspecting an object using a structured light measurement system that includes a light source for projecting light onto a surface of the object and an imaging sensor for receiving light reflected from the object. The method includes determining a position of at least one of the light source and the imaging sensor with respect to the object based on at least one of a three-dimensional model of the object and a three-dimensional model of the structured light measurement system.

Abstract translation: 一种用于使用结构化光测量系统检查物体的方法，该系统包括用于将光投射到物体的表面上的光源和用于接收从物体反射的光的成像传感器。 该方法包括基于物体的三维模型和结构光测量系统的三维模型中的至少一个来确定光源和成像传感器中的至少一个相对于对象的位置。

公开(公告)号：US07092094B2

公开(公告)日：2006-08-15

申请号：US10673598

申请日：2003-09-29

Applicant: Xiaoping Qian ,  Kevin George Harding

Inventor： Xiaoping Qian ,  Kevin George Harding

IPC: G01J4/00

CPC classification number: G01B11/25 ,  G01N21/21 ,  G01N2201/0635

Abstract: The present disclosure provides for an optical metrology system for scanning an object (106) having a shiny surface. The optical metrology system includes at least one light source (102) configured and adapted to emit a structured light pattern (L) against the surface of the object, at least one first polarizer (108) disposed between the light source and the object such that the light pattern passes therethrough, the first polarizer being configured and adapted to vary at least one of the plane of polarization and the polarization angle of the light pattern, at least one camera (124a–124c) configured and adapted to take images of the object, and at least one second polarizer disposed between the camera and the object, the second polarizer having a fixed orientation.

Abstract translation: 本公开提供了一种用于扫描具有光泽表面的物体（106）的光学测量系统。 光学测量系统包括至少一个光源（102），其配置并适于发射抵靠物体表面的结构化光图案（L），设置在光源和物体之间的至少一个第一偏振器（108），使得 所述光图案通过其中，所述第一偏振器被配置和适于改变所述光图案的偏振平面和偏振角中的至少一个，至少一个相机（124a -124c）被配置并适于拍摄 物体以及设置在相机和物体之间的至少一个第二偏振器，第二偏振器具有固定的取向。