发明申请
- 专利标题: AC Ionizer with Enhanced Ion Balance
- 专利标题(中): 具有增强离子平衡的AC电离器
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申请号: US11556589申请日: 2006-11-03
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公开(公告)号: US20070103842A1公开(公告)日: 2007-05-10
- 发明人: Leslie Partridge , Grigoriy Vernitskiy , Peter Gefter
- 申请人: Leslie Partridge , Grigoriy Vernitskiy , Peter Gefter
- 申请人地址: US MA Wilmington 01887
- 专利权人: MKS INSTRUMENTS, INC.
- 当前专利权人: MKS INSTRUMENTS, INC.
- 当前专利权人地址: US MA Wilmington 01887
- 主分类号: H05F3/00
- IPC分类号: H05F3/00
摘要:
An improved ionizer for providing an enhanced ion balance of negative and positive ions is disclosed. The ionizer may include a first ion emitter and a second ion emitter; at least one reference electrode coupled to ground; and a power supply for providing an AC voltage to the first and second ion emitter. This power supply is DC isolated from ground. In addition, the present invention includes a first rectifier coupled in series between the first ion emitter and the power supply, a second rectifier coupled in series between the second ion emitter and the power supply. The first and second rectifiers cause a DC bipolar voltage to be created from the first and second ion emitters during operation of the ionizer.
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