发明申请
- 专利标题: Front side illuminated photodiode with backside bump
- 专利标题(中): 前侧照明光电二极管,带背面凸块
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申请号: US11414128申请日: 2006-04-28
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公开(公告)号: US20070105265A1公开(公告)日: 2007-05-10
- 发明人: Jay Lai , Truc Vu , Gary Warren
- 申请人: Jay Lai , Truc Vu , Gary Warren
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
This invention relates to a novel optoelectronic chip with one or more optoelectronic devices, such as photodiodes, fabricated on a front side of a semiconductor wafer and contacts on a backside of the semiconductor wafer. The backside contacts can be contact bumps, which allow the optoelectronic chip to achieve the benefits of flip chip packaging without flipping the optoelectronic chip upside down with respect to a chip carrier. In an optical communication system, a photodiode chip can be backside bumped to a chip carrier or an electronic chip, allowing front side illumination of the photodiode chip. Front side illumination offers many benefits, including improved fiber alignment, reduced manufacturing time, and overall cost reduction.
公开/授权文献
- US07479401B2 Front side illuminated photodiode with backside bump 公开/授权日:2009-01-20
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