Invention Application
- Patent Title: Monolithically integrated semiconductor materials and devices
- Patent Title (中): 单片集成半导体材料和器件
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Application No.: US11591333Application Date: 2006-11-01
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Publication No.: US20070105274A1Publication Date: 2007-05-10
- Inventor: Eugene Fitzgerald
- Applicant: Eugene Fitzgerald
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/02

Abstract:
Methods and structures for monolithically integrating monocrystalline silicon and monocrystalline non-silicon materials and devices are provided. In one structure, a semiconductor structure includes a silicon substrate and a first monocrystalline semiconductor layer disposed over the silicon substrate, wherein the first monocrystalline semiconductor layer has a lattice constant different from a lattice constant of relaxed silicon. The semiconductor structure further includes an insulating layer disposed over the first monocrystalline semiconductor layer in a first region, a monocrystalline silicon layer disposed over the insulating layer in the first region, and a second monocrystalline semiconductor layer disposed over at least a portion of the first monocrystalline semiconductor layer in a second region and absent from the first region. The second monocrystalline semiconductor layer has a lattice constant different from the lattice constant of relaxed silicon.
Public/Granted literature
- US08012592B2 Monolithically integrated semiconductor materials and devices Public/Granted day:2011-09-06
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