发明申请
US20070107495A1 Particle adsorption chamber, sampling apparatus having a particle adsorption chamber, and sampling method using the same 审中-公开
颗粒吸附室,具有颗粒吸附室的取样装置,以及采用该吸附室的采样方法

Particle adsorption chamber, sampling apparatus having a particle adsorption chamber, and sampling method using the same
摘要:
A particle adsorption device includes a chamber having an inlet and an outlet by which air can pass through the chamber, a support for supporting an adsorbent plate in the chamber, and at least one porous plate disposed in the chamber to control the air flow through the chamber and over a surface of the adsorbent plate. A sampling apparatus includes a particle counter which has a detector that is operative to count particles of a certain size contained in the air, the particle adsorption device, and a probe by which a sample of air is sequentially or selectively fed to the particle adsorption device and the particle counter. Thus, in a method for use in monitoring a manufacturing environment for potential contamination, particles of a certain size in the air can be counted, and particles in the air can be collected on the surface of the adsorbent plate. The collected particles can be analyzed to determine their shape and composition. Te source of the particles can be traced from data produced using the sampling apparatus.
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