公开(公告)号：US20070107495A1

公开(公告)日：2007-05-17

申请号：US11595976

申请日：2006-11-13

申请人： Dong-Hyun Kim ,  Bok-Seok Yang ,  Do-Hyun Cho ,  Hwan-Ki Choi ,  Jung-Hee Na ,  Gung-Hang Ryu

发明人： Dong-Hyun Kim ,  Bok-Seok Yang ,  Do-Hyun Cho ,  Hwan-Ki Choi ,  Jung-Hee Na ,  Gung-Hang Ryu

IPC分类号： G01N19/10 ,  G01N1/22

CPC分类号： G01N15/0272

摘要： A particle adsorption device includes a chamber having an inlet and an outlet by which air can pass through the chamber, a support for supporting an adsorbent plate in the chamber, and at least one porous plate disposed in the chamber to control the air flow through the chamber and over a surface of the adsorbent plate. A sampling apparatus includes a particle counter which has a detector that is operative to count particles of a certain size contained in the air, the particle adsorption device, and a probe by which a sample of air is sequentially or selectively fed to the particle adsorption device and the particle counter. Thus, in a method for use in monitoring a manufacturing environment for potential contamination, particles of a certain size in the air can be counted, and particles in the air can be collected on the surface of the adsorbent plate. The collected particles can be analyzed to determine their shape and composition. Te source of the particles can be traced from data produced using the sampling apparatus.

摘要翻译： 颗粒吸附装置包括具有入口和出口的室，空气可以通过该室，用于在室中支撑吸附板的支撑件和设置在室中的至少一个多孔板，以控制通过所述室的空气流 并且在吸附板的表面上方。 采样装置包括具有检测器的颗粒计数器，该检测器用于对包含在空气中的一定尺寸的颗粒进行计数，颗粒吸附装置以及将空气样品依次或选择性地供给至颗粒吸附装置的探针 和粒子计数器。 因此，在用于监测潜在污染的制造环境的方法中，可以对空气中的一定尺寸的颗粒进行计数，并且可以在吸附剂板的表面上收集空气中的颗粒。 可以分析收集的颗粒以确定它们的形状和组成。 可以使用采样装置产生的数据追踪颗粒的Te源。