发明申请
- 专利标题: Non-volatile memory devices having floating gates and related methods of forming the same
- 专利标题(中): 具有浮动栅极的非易失性存储器件及其相关方法
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申请号: US11594327申请日: 2006-11-08
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公开(公告)号: US20070108498A1公开(公告)日: 2007-05-17
- 发明人: Joon-Hee Lee , Jong-Ho Park , Jin-Hyun Shin , Sung-Hoi Hur , Yong-Seok Kim , Jong-Won Kim
- 申请人: Joon-Hee Lee , Jong-Ho Park , Jin-Hyun Shin , Sung-Hoi Hur , Yong-Seok Kim , Jong-Won Kim
- 优先权: KR2005-107907 20051111
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
A nonvolatile memory device may include a substrate having a cell region, and a cell device isolation layer on the cell region of the substrate to define a cell active region. A floating gate may include a lower floating gate and an upper floating gate sequentially stacked on the cell active region, and a tunnel insulation pattern may be between the floating gate and the cell active region. A control gate electrode may be on the floating gate, and a blocking insulation pattern may be between the control gate electrode and the floating gate. More particularly, the upper floating gate may include a flat portion on the lower floating gate and a pair of wall portions extending upward from both edges of the flat portion adjacent to the cell device isolation layer. Moreover, a width of an upper portion of a space surrounded by the flat portion and the pair of wall portions may be larger than a width of a lower portion of the space. Related methods are also discussed.
公开/授权文献
- US07592665B2 Non-volatile memory devices having floating gates 公开/授权日:2009-09-22
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