发明申请
- 专利标题: SINGLE-POLY NON-VOLATILE MEMORY DEVICE
- 专利标题(中): 单一非易失性存储器件
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申请号: US11277364申请日: 2006-03-24
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公开(公告)号: US20070108508A1公开(公告)日: 2007-05-17
- 发明人: Chrong-Jung Lin , Hsin-Ming Chen , Shih-Jye Shen , Ya-Chin King , Ching-Hsiang Hsu
- 申请人: Chrong-Jung Lin , Hsin-Ming Chen , Shih-Jye Shen , Ya-Chin King , Ching-Hsiang Hsu
- 主分类号: H01L29/792
- IPC分类号: H01L29/792 ; H01L21/336
摘要:
A single-poly, P-channel non-volatile memory (NVM) cell that is fully compatible with nano-scale semiconductor manufacturing process is provided. The single-poly, P-channel non-volatile memory cell includes an N well, a gate formed on the N well, a gate dielectric layer between the gate and the N well, an ONO layers on sidewalls of the gate, a P+ source doping region and a P+ drain doping region. The ONO layers include a first oxide layer deposited on the sidewalls of the gate and extends to the N well, and a silicon nitride layer formed on the first oxide layer. The silicon nitride layer functions as a charge-trapping layer. The metallurgical junction of P-type drain and N-type well locates underneath the sidewall ONO layers.
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