发明申请
US20070110971A1 Carbon nanotube growth method 有权
碳纳米管生长法

  • 专利标题: Carbon nanotube growth method
  • 专利标题(中): 碳纳米管生长法
  • 申请号: US10552546
    申请日: 2004-04-14
  • 公开(公告)号: US20070110971A1
    公开(公告)日: 2007-05-17
  • 发明人: Anne-Marie Bonnot
  • 申请人: Anne-Marie Bonnot
  • 优先权: FR03/04830 20030417
  • 国际申请: PCT/FR04/50160 WO 20040414
  • 主分类号: C23C16/00
  • IPC分类号: C23C16/00 B32B5/16 B32B15/04
Carbon nanotube growth method
摘要:
The invention relates to a method of growing carbon nanotubes (5) on a substrate (1) using a hot-wire-assisted chemical vapour deposition method. The inventive method consists in first depositing a bilayer of titanium (12) and cobalt (13) on the substrate such that: the thickness of the titanium layer is between 0.5 and 5 nm, the thickness of the cobalt layer is between 0.25 and 10 nm, and the thickness of the cobalt layer is between half and double that of the titanium layer.
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