发明申请
- 专利标题: Carbon nanotube growth method
- 专利标题(中): 碳纳米管生长法
-
申请号: US10552546申请日: 2004-04-14
-
公开(公告)号: US20070110971A1公开(公告)日: 2007-05-17
- 发明人: Anne-Marie Bonnot
- 申请人: Anne-Marie Bonnot
- 优先权: FR03/04830 20030417
- 国际申请: PCT/FR04/50160 WO 20040414
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; B32B5/16 ; B32B15/04
摘要:
The invention relates to a method of growing carbon nanotubes (5) on a substrate (1) using a hot-wire-assisted chemical vapour deposition method. The inventive method consists in first depositing a bilayer of titanium (12) and cobalt (13) on the substrate such that: the thickness of the titanium layer is between 0.5 and 5 nm, the thickness of the cobalt layer is between 0.25 and 10 nm, and the thickness of the cobalt layer is between half and double that of the titanium layer.
公开/授权文献
- US08481163B2 Carbon nanotube growth method 公开/授权日:2013-07-09
信息查询
IPC分类: