发明申请
- 专利标题: Resist composition and patterning process using the same
- 专利标题(中): 抗蚀剂组成和图案化工艺使用相同
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申请号: US11580962申请日: 2006-10-16
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公开(公告)号: US20070111140A1公开(公告)日: 2007-05-17
- 发明人: Jun Hatakeyama , Koji Hasegawa , Youichi Ohsawa , Seiichiro Tachibana
- 申请人: Jun Hatakeyama , Koji Hasegawa , Youichi Ohsawa , Seiichiro Tachibana
- 申请人地址: JP TOKYO
- 专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人地址: JP TOKYO
- 优先权: JP2005-332189 20051116
- 主分类号: G03C1/00
- IPC分类号: G03C1/00
摘要:
There is disclosed a resist composition which shows high sensitivity and high resolution on exposure to high energy beam, provides reduced Line Edge Roughness because swelling at the time of development is reduced, provides minor amounts of residue after development, has excellent dry etching resistance, and can also be used suitably for the liquid immersion lithography; and a patterning process using the resist composition. There can be provided a resist composition which comprises, at least, a polymer including repeating units represented by the following general formulae (a) and (b).
公开/授权文献
- US07629106B2 Resist composition and patterning process using the same 公开/授权日:2009-12-08
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