发明申请
- 专利标题: VISION SYSTEM
- 专利标题(中): 视觉系统
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申请号: US11617035申请日: 2006-12-28
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公开(公告)号: US20070112465A1公开(公告)日: 2007-05-17
- 发明人: Iraj Sadighi , Jeff Hudgens , Michael Rice , Gary Wyka
- 申请人: Iraj Sadighi , Jeff Hudgens , Michael Rice , Gary Wyka
- 主分类号: G06F19/00
- IPC分类号: G06F19/00
摘要:
A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.
公开/授权文献
- US07627395B2 Vision system 公开/授权日:2009-12-01
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