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公开(公告)号：US07627395B2
公开(公告)日：2009-12-01
申请号：US11617035
申请日：2006-12-28
申请人： Iraj Sadighi , Jeff Hudgens , Michael Rice , Gary Wyka
发明人： Iraj Sadighi , Jeff Hudgens , Michael Rice , Gary Wyka
IPC分类号： G06F19/00
CPC分类号： H01L21/67259 , B25J9/1692 , B25J9/1697 , G05B2219/45031 , H01L21/681
摘要： A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.
摘要翻译： 提供了一种用于校准设置在处理系统中的机器人的运动的视觉系统和方法。 在一个实施例中，用于处理系统的视觉系统包括位于处理系统中的相机和校准晶片。 相机位于机器人上，并且适于获得设置在处理系统内的预定位置的校准晶片的图像数据。 图像数据用于校准机器人运动。
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公开(公告)号：US07233841B2
公开(公告)日：2007-06-19
申请号：US10387267
申请日：2003-03-11
申请人： Iraj Sadighi , Jeff Hudgens , Michael Rice , Gary Wyka
发明人： Iraj Sadighi , Jeff Hudgens , Michael Rice , Gary Wyka
IPC分类号： G06F19/00
CPC分类号： H01L21/67259 , B25J9/1692 , B25J9/1697 , G05B2219/45031 , H01L21/681
摘要： A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.
摘要翻译： 提供了一种用于校准设置在处理系统中的机器人的运动的视觉系统和方法。 在一个实施例中，用于处理系统的视觉系统包括位于处理系统中的相机和校准晶片。 相机位于机器人上，并且适于获得设置在处理系统内的预定位置的校准晶片的图像数据。 图像数据用于校准机器人运动。
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公开(公告)号：US20070112465A1
公开(公告)日：2007-05-17
申请号：US11617035
申请日：2006-12-28
申请人： Iraj Sadighi , Jeff Hudgens , Michael Rice , Gary Wyka
发明人： Iraj Sadighi , Jeff Hudgens , Michael Rice , Gary Wyka
IPC分类号： G06F19/00
CPC分类号： H01L21/67259 , B25J9/1692 , B25J9/1697 , G05B2219/45031 , H01L21/681
摘要： A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.
摘要翻译： 提供了一种用于校准设置在处理系统中的机器人的运动的视觉系统和方法。 在一个实施例中，用于处理系统的视觉系统包括位于处理系统中的相机和校准晶片。 相机位于机器人上，并且适于获得设置在处理系统内的预定位置的校准晶片的图像数据。 图像数据用于校准机器人运动。
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公开(公告)号：US07085622B2
公开(公告)日：2006-08-01
申请号：US10126493
申请日：2002-04-19
申请人： Iraj Sadighi , Jeff Hudgens , Michael Rice , Gary Wyka
发明人： Iraj Sadighi , Jeff Hudgens , Michael Rice , Gary Wyka
IPC分类号： G06F19/00
CPC分类号： H01L21/67259 , B25J9/1697 , H01L21/681
摘要： Generally a method and apparatus for viewing images within a processing system is provided. In one embodiment, an apparatus includes a plate having a camera, transmitter and battery coupled thereto. The plate is adapted to be transported about a semiconductor processing system by a substrate transfer robot thereby allowing images within the system to be viewed remotely from the system. The viewed images may be used for system inspection and calibration of robot position, among other uses.
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公开(公告)号：US6166509A
公开(公告)日：2000-12-26
申请号：US349001
申请日：1999-07-07
申请人： Gary Wyka , Jaime Carrera , Van Hoskins
发明人： Gary Wyka , Jaime Carrera , Van Hoskins
CPC分类号： G05B19/404 , G05B2219/36504 , G05B2219/45057 , G05B2219/50063 , H01L21/681 , Y10S414/136
摘要： The present invention provides a method and apparatus for determining whether a substrate is in a clamped or unclamped state on a robot blade and preferably allows the position of a properly clamped substrate to be compensated for misalignments due to substrates not at or very near to their nominal positions on the blade. A sensor unit comprising a radiation source and a detector and capable of transmitting and receiving a signal is mounted outside a transfer chamber and is positioned to direct the signal therein. A robot blade having a reflecting member is actuated through the transfer chamber and into the path of the signal. The reflecting member is preferably positioned on a clamp finger and causes the signal to be reflected to the detector of the sensor unit when the signal is incident on the reflecting member. As the reflecting member moves through the signal the output of the sensor unit switches states, thereby generating values corresponding to the position of the reflecting member. Positional information may be derived from these values by comparison to predetermined, nominal positional information. The substrate is determined to be either unclamped, in which case the system is halted for operator intervention, or clamped. If the substrate is clamped, the derived positional information can be used to make adjustments for deviations from a nominal position due to variations in the diameter of the substrate.
摘要翻译： 本发明提供了一种用于确定衬底在机器人刀片上是否处于夹紧或未夹紧状态的方法和装置，并且优选地允许由于不在或非常接近其标称的衬底而使适当夹紧的衬底的位置被补偿由于不对准 刀片上的位置。 包括辐射源和检测器并且能够发送和接收信号的传感器单元安装在传送室外部并被定位成将信号引导到其中。 具有反射构件的机器人刀片通过传送室被致动并进入信号的路径。 当信号入射到反射构件上时，反射构件优选地定位在夹钳上并使信号被反射到传感器单元的检测器。 当反射构件移动通过信号时，传感器单元的输出切换状态，从而产生与反射构件的位置对应的值。 通过与预定的标称位置信息进行比较，可以从这些值导出位置信息。 确定底物是松开的，在这种情况下，系统停止操作员干预或夹紧。 如果基板被夹紧，则导出的位置信息可以用于对由于基板的直径的变化引起的与标称位置的偏差进行调整。
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公开(公告)号：US06313596B1
公开(公告)日：2001-11-06
申请号：US09709621
申请日：2000-11-10
申请人： Gary Wyka , Jaime Carrera , Van Hoskins
发明人： Gary Wyka , Jaime Carrera , Van Hoskins
IPC分类号： G05B106
CPC分类号： G05B19/404 , G05B2219/36504 , G05B2219/45057 , G05B2219/50063 , H01L21/681 , Y10S414/136
摘要： The present invention provides a method and apparatus for determining whether a substrate is in a clamped or unclamped state on a robot blade and preferably allows the position of a properly clamped substrate to be compensated for misalignments due to substrates not at or very near to their nominal positions on the blade. A sensor unit comprising a radiation source and a detector and capable of transmitting and receiving a signal is mounted outside a transfer chamber and is positioned to direct the signal therein. A robot blade having a reflecting member is actuated through the transfer chamber and into the path of the signal. The reflecting member is preferably positioned on a clamp finger and causes the signal to be reflected to the detector of the sensor unit when the signal is incident on the reflecting member. As the reflecting member moves through the signal the output of the sensor unit switches states, thereby generating values corresponding to the position of the reflecting member. Positional information may be derived from these values by comparison to predetermined, nominal positional information. The substrate is determined to be either unclamped, in which case the system is halted for operator intervention, or clamped. If the substrate is clamped, the derived positional information can be used to make adjustments for deviations from a nominal position due to variations in the diameter of the substrate.
摘要翻译： 本发明提供了一种用于确定衬底在机器人刀片上是否处于夹紧或未夹紧状态的方法和装置，并且优选地允许由于不在或非常接近其标称的衬底而使适当夹紧的衬底的位置被补偿由于不对准 刀片上的位置。 包括辐射源和检测器并且能够发送和接收信号的传感器单元安装在传送室外部并被定位成将信号引导到其中。 具有反射构件的机器人刀片通过传送室被致动并进入信号的路径。 当信号入射到反射构件上时，反射构件优选地定位在夹钳上并使信号被反射到传感器单元的检测器。 当反射构件移动通过信号时，传感器单元的输出切换状态，从而产生与反射构件的位置对应的值。 通过与预定的标称位置信息进行比较，可以从这些值导出位置信息。 确定底物是松开的，在这种情况下，系统停止操作员干预或夹紧。 如果基板被夹紧，则导出的位置信息可以用于对由于基板的直径的变化引起的与标称位置的偏差进行调整。
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