A low-hydrogen photovoltaic cell is disclosed. The photovoltaic cell may contain less than 5% hydrogen. In one aspect, the photovoltaic cell may contain substantially no hydrogen, that is, the photovoltaic cell may be substantially hydrogen free. The photovoltaic cell includes a substrate and an absorber deposited on to the substrate. The absorber may typically include elements from group 11, group 12, and group 13 of the Periodic Table, for example, copper, indium, and gallium. The absorber may be treated with selenium and/or sulfur to produce a CIGS or CIGSS-type photovoltaic cell. The low-hydrogen photovoltaic cell may fabricated by a method and apparatus adapted to control metalloid vapor delivery, for example, in a low-hydrogen or hydrogen free atmosphere.