发明申请
US20070123023A1 Method of forming dual interconnects in manufacturing MRAM cells
有权
在制造MRAM单元中形成双互连的方法
- 专利标题: Method of forming dual interconnects in manufacturing MRAM cells
- 专利标题(中): 在制造MRAM单元中形成双互连的方法
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申请号: US11289787申请日: 2005-11-30
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公开(公告)号: US20070123023A1公开(公告)日: 2007-05-31
- 发明人: Woosik Kim , Chanro Park
- 申请人: Woosik Kim , Chanro Park
- 主分类号: H01L21/4763
- IPC分类号: H01L21/4763
摘要:
A method of forming dual interconnects in a magnetoresistive memory cell includes: providing an intermediate product including: a metallization layer including metallic lines; a magnetoresistive junction element conductively connected to a first of the metallic lines by a via through a first non-conductive layer; a metallic hard mask disposed on the magnetoresistive junction element; a second non-conductive layer above the first non-conductive layer in regions over the hard mask and a second of the metallic lines; a third non-conductive layer disposed above the hard mask; and a fourth non-conductive layer disposed on the third non-conductive layer. The method further includes partially opening first and second trenches to uncover the second non-conductive layer above the hard mask and second metallic line, respectively; fully opening the first and second trenches to uncover the hard mask and second metallic line, respectively; and filling the first and second trenches with conductive material.
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