发明申请
US20070124917A1 Integration of small flash field, zero bias, and non-reactive ion milling for pole tip uniformity 有权
集成小闪场,零偏置和非反应离子铣削,使刀尖均匀

Integration of small flash field, zero bias, and non-reactive ion milling for pole tip uniformity
摘要:
A method of manufacturing a magnetic write head that provides improved pole critical dimension control, such as improved track width control (improved sigma) and improved flare point control. The method involves a combination of several process improvements, such as photolithographically patterning a P2 pole tip defining photoresist frame using a zero print bias and also using a small flash field. The method also involves the use of a non-reactive ion etch to notch the first pole (P1) using the second pole (P2) as a mask.
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