发明申请
- 专利标题: Integration of small flash field, zero bias, and non-reactive ion milling for pole tip uniformity
- 专利标题(中): 集成小闪场,零偏置和非反应离子铣削,使刀尖均匀
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申请号: US11297228申请日: 2005-12-07
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公开(公告)号: US20070124917A1公开(公告)日: 2007-06-07
- 发明人: Hamid Balamame , Daniel Bedell , Mary Gutberlet , Clarence Hsieh , Aron Pentek , Yi Zheng
- 申请人: Hamid Balamame , Daniel Bedell , Mary Gutberlet , Clarence Hsieh , Aron Pentek , Yi Zheng
- 专利权人: HITACHI GLOBAL STORAGE TECHNOLOGIES
- 当前专利权人: HITACHI GLOBAL STORAGE TECHNOLOGIES
- 主分类号: G11B5/127
- IPC分类号: G11B5/127 ; H04R31/00
摘要:
A method of manufacturing a magnetic write head that provides improved pole critical dimension control, such as improved track width control (improved sigma) and improved flare point control. The method involves a combination of several process improvements, such as photolithographically patterning a P2 pole tip defining photoresist frame using a zero print bias and also using a small flash field. The method also involves the use of a non-reactive ion etch to notch the first pole (P1) using the second pole (P2) as a mask.
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