公开(公告)号：US08619391B2

公开(公告)日：2013-12-31

申请号：US12914543

申请日：2010-10-28

申请人： Yimin Hsu ,  Aron Pentek ,  Thomas Roucoux ,  Jing Zhang ,  Honglin Zhu

发明人： Yimin Hsu ,  Aron Pentek ,  Thomas Roucoux ,  Jing Zhang ,  Honglin Zhu

IPC分类号： G11B5/31

CPC分类号： G11B5/3116 ,  G11B5/3163

摘要： Magnetic write heads and corresponding fabrication methods for bi-layer wrap around shields resulting in dissimilar shield layer widths are disclosed. A gap structure is formed around a main write pole for a magnetic write head. A wrap around shield for the main write pole is fabricated to include a first magnetic layer proximate to the main write pole and a second magnetic layer on the first magnetic layer. A width of the first magnetic layer is less than the width of the second magnetic layer, and back edges of the first and second magnetic layers are coplanar. Further, a throat height of the wrap around shield is maintained between the first and the second magnetic layers because their back edges are coplanar.

摘要翻译： 公开了用于双层缠绕屏蔽的磁性写头和相应的制造方法，导致不同的屏蔽层宽度。 在用于磁写头的主写磁极周围形成间隙结构。 制造用于主写极的环绕屏蔽件，以包括靠近主写磁极的第一磁性层和第一磁性层上的第二磁性层。 第一磁性层的宽度小于第二磁性层的宽度，第一和第二磁性层的后边缘是共面的。 此外，由于它们的后边缘是共面的，缠绕屏蔽的喉部高度保持在第一和第二磁性层之间。

公开(公告)号：US08318031B2

公开(公告)日：2012-11-27

申请号：US12748182

申请日：2010-03-26

申请人： Aron Pentek ,  Thomas J. A. Roucoux ,  Yi Zheng

发明人： Aron Pentek ,  Thomas J. A. Roucoux ,  Yi Zheng

IPC分类号： B44C1/22

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315

摘要： A method for manufacturing a magnetic write head having a write pole with a tapered leading edge and a tapered trailing edge. The method includes forming a non-magnetic bump player over a surface, forming a mask over the non-magnetic bump layer and performing a first ion milling to form a tapered back edge on the non-magnetic bump layer. A magnetic write pole material is then deposited over the surface and over the non-magnetic bump layer. Then a non-magnetic step structure is formed over the magnetic write pole material and an ion milling is performed to form a taper on the upper surface of the write pole. The write pole lateral dimensions can then be defined, and a non-magnetic bump formed over the tapered portion of the upper surface of the write pole. Another ion milling can then be performed to extend the taper of the surface of the write pole.

摘要翻译： 一种用于制造具有带有锥形前缘和锥形后缘的写极的磁写头的方法。 所述方法包括在表面上形成非磁性碰撞播放器，在非磁性凸块层上形成掩模，并执行第一离子铣削以在非磁性凸块层上形成锥形后缘。 然后将磁性写入磁极材料沉积在表面上并在非磁性凸起层上方。 然后在磁性写入磁极材料上形成非磁性阶梯结构，并且执行离子铣削以在写入极的上表面上形成锥形。 然后可以限定写入极横向尺寸，并且在写入极的上表面的锥形部分上形成非磁性凸块。 然后可以执行另一种离子铣削来延伸写极的表面的锥度。

公开(公告)号：US20120106002A1

公开(公告)日：2012-05-03

申请号：US12914543

申请日：2010-10-28

申请人： Yimin Hsu ,  Aron Pentek ,  Thomas Roucoux ,  Jing Zhang ,  Honglin Zhu

发明人： Yimin Hsu ,  Aron Pentek ,  Thomas Roucoux ,  Jing Zhang ,  Honglin Zhu

IPC分类号： G11B5/127 ,  B05D5/12

CPC分类号： G11B5/3116 ,  G11B5/3163

摘要： Magnetic write heads and corresponding fabrication methods for bi-layer wrap around shields resulting in dissimilar shield layer widths are disclosed. A gap structure is formed around a main write pole for a magnetic write head. A wrap around shield for the main write pole is fabricated to include a first magnetic layer proximate to the main write pole and a second magnetic layer on the first magnetic layer. A width of the first magnetic layer is less than the width of the second magnetic layer, and back edges of the first and second magnetic layers are coplanar. Further, a throat height of the wrap around shield is maintained between the first and the second magnetic layers because their back edges are coplanar.

摘要翻译： 公开了用于双层缠绕屏蔽的磁性写头和相应的制造方法，导致不同的屏蔽层宽度。 在用于磁写头的主写磁极周围形成间隙结构。 制造用于主写极的环绕屏蔽件，以包括靠近主写磁极的第一磁性层和第一磁性层上的第二磁性层。 第一磁性层的宽度小于第二磁性层的宽度，第一和第二磁性层的后边缘是共面的。 此外，由于它们的后边缘是共面的，缠绕屏蔽的喉部高度保持在第一和第二磁性层之间。

公开(公告)号：US20120094009A1

公开(公告)日：2012-04-19

申请号：US12904636

申请日：2010-10-14

申请人： Donald Allen ,  Jennifer Ai-Ming Leung ,  Aron Pentek ,  Thomas Roucoux

发明人： Donald Allen ,  Jennifer Ai-Ming Leung ,  Aron Pentek ,  Thomas Roucoux

IPC分类号： C23C16/52 ,  B05D5/00

CPC分类号： G11B5/3166 ,  G11B5/3169 ,  G11B5/6082 ,  Y10T29/49039 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： Methods of fabricating magnetic write heads and electrical lapping guides (ELG's) using a split gap deposition process is described. A removal process is performed on a magnetic material to define a main write pole and to define a corresponding ELG for the main write pole. A first non-magnetic gap layer is deposited. A mask and liftoff process is performed to deposit an electrically conductive material on the first gap layer disposed along a front edge of the ELG. A second non-magnetic gap layer is then deposited and a shield is fabricated for the write pole.

摘要翻译： 描述了使用分割间隙沉积工艺制造磁性写入头和电气研磨导向器（ELG）的方法。 在磁性材料上执行移除过程以限定主写极并且为主写极定义相应的ELG。 沉积第一非磁隙层。 执行掩模和剥离处理以将导电材料沉积在沿着ELG的前边缘设置的第一间隙层上。 然后沉积第二非磁性间隙层，并为写入极制造屏蔽。

公开(公告)号：US20110262774A1

公开(公告)日：2011-10-27

申请号：US12766769

申请日：2010-04-23

申请人： Aron Pentek ,  Yi Zheng

发明人： Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/33

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  Y10T428/1171

摘要： A magnetic write head having write pole and a wrap-around-trailing magnetic shield having side portions that are separated from the write pole by tapered non-magnetic side gap layers. The tapered non-magnetic side gap layers provide a non-magnetic side gap width that increases with increasing distance from the ABS, thereby providing optimal protection against adjacent track interference at the ABS while minimizing write field loss to the shield in regions away from the ABS.

摘要翻译： 具有写磁极的磁写头和卷绕后磁屏蔽，其具有通过锥形非磁性侧间隙层与写极分离的侧部。 锥形非磁性侧间隙层提供随着与ABS的距离的增加而增加的非磁性侧间隙宽度，从而为ABS提供最佳保护，以防止相邻的轨道干涉，同时最小化远离ABS的区域对屏蔽的写入场损失 。

公开(公告)号：US08028399B2

公开(公告)日：2011-10-04

申请号：US11957481

申请日：2007-12-16

申请人： Amanda Baer ,  Jeffrey S. Lille ,  Aron Pentek

发明人： Amanda Baer ,  Jeffrey S. Lille ,  Aron Pentek

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： Write elements and methods of fabricating magnetic write poles are described. For one method, a vertical mask structure is formed on a magnetic layer in locations of a pole tip and a yoke of a write pole. The vertical mask structure may be formed by coating vertical surfaces of resists with an atomic layer deposition (ALD) process or a similar process. A removal process is then performed around the vertical mask structure to define the pole tip and part of the yoke of the write pole, and the vertical mask structure is removed. A lower portion of the pole tip is them masked while the upper portion of the pole tip and the part of the yoke is exposed. The upper portion of the pole tip and the part of the yoke are then expanded with magnetic material, such as with a plating process.

摘要翻译： 描述制造磁性写入极的写入元件和方法。 对于一种方法，在写入极的极尖和磁轭的位置的磁性层上形成垂直掩模结构。 垂直掩模结构可以通过用原子层沉积（ALD）工艺或类似工艺涂覆抗蚀剂的垂直表面而形成。 然后围绕垂直掩模结构执行去除处理以限定磁极尖端和写极的磁轭的一部分，并且去除垂直掩模结构。 极尖的下部被掩蔽，而极尖的上部和轭的一部分露出。 然后用磁性材料例如电镀工艺使磁极尖端的上部和磁轭的一部分膨胀。

公开(公告)号：US20110147222A1

公开(公告)日：2011-06-23

申请号：US12641138

申请日：2009-12-17

申请人： Aron Pentek ,  Yi Zheng

发明人： Aron Pentek ,  Yi Zheng

IPC分类号： C23C14/32 ,  C25D5/10

CPC分类号： C25D7/001 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163 ,  Y10T428/115

摘要： A method for manufacturing a magnetic write head that has a trailing magnetic shield with a tapered write pole trailing edge, a non-magnetic step layer and a Ru bump and an alumina bump formed at the front of the non-magnetic step layer. The process forms a Ru/alumina side wall at the sides of the write pole, such that the Ru side wall is closest to the write pole. The Ru is removed more readily than the alumina during the ion milling that is performed to taper the write pole. This causes the Ru portion of the side wall to taper away from the write pole rather than forming an abrupt step. This tapering prevents dishing of the trailing edge of the write pole for improved write head performance.

摘要翻译： 一种用于制造具有形成在非磁性阶梯层前面的锥形写磁头后缘的后磁屏蔽，非磁性阶梯层和Ru凸块以及氧化铝凸块的磁写头的方法。 该工艺在写入极的两侧形成Ru /氧化铝侧壁，使得Ru侧壁最靠近写入极。 在离子铣削期间，Ru比氧化铝更容易地被除去，以使得写柱变钝。 这使得侧壁的Ru部分远离写入磁极而变浅，而不是形成突然的步骤。 这种渐缩防止了写磁极的后缘的凹陷以改善写头性能。

公开(公告)号：US07881010B2

公开(公告)日：2011-02-01

申请号：US11956277

申请日：2007-12-13

申请人： Hung-Chin Guthrie ,  Ming Jiang ,  Edward Hin Pong Lee ,  Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Hung-Chin Guthrie ,  Ming Jiang ,  Edward Hin Pong Lee ,  Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： G11B5/187

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/315

摘要： A method for manufacturing a magnetic write head having a write pole with a flared step feature that defines a secondary flare point. The method involves depositing a magnetic write pole material on a substrate and then depositing a magnetic material over the write pole material followed by a non-magnetic material. A first mask is formed having a front edge to define the location of the secondary flare point, and one or more material removal processes are used to remove portions of the magnetic layer and non-magnetic layer that are not protected by this first mask. The first mask is replaced by a second mask that is configured to define a write pole, and an ion milling is performed to define the write pole. Shadowing from the magnetic layer and non-magnetic layer form a flared secondary flare point.

摘要翻译： 一种用于制造具有定义二次闪光点的具有扩口步骤特征的写极的磁写头的方法。 该方法包括将磁性写入极材料沉积在衬底上，然后将磁性材料沉积在写入极材料上，随后是非磁性材料。 形成第一掩模，其具有前边缘以限定次级火炬点的位置，并且使用一个或多个材料去除过程来去除未被该第一掩模保护的磁性层和非磁性层的部分。 第一个掩模由配置为定义写入极的第二个掩模代替，并且执行离子铣削来定义写入极点。 从磁性层和非磁性层的阴影形成扩张的次级耀斑点。

公开(公告)号：US20100296193A1

公开(公告)日：2010-11-25

申请号：US12849796

申请日：2010-08-03

申请人： John I. Kim ,  Aron Pentek

发明人： John I. Kim ,  Aron Pentek

IPC分类号： G11B5/10

CPC分类号： G11B5/1278 ,  G11B5/11 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/3163 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A perpendicular magnetic recording write head has a write pole, a trapezoidal-shaped trailing shield notch, and a gap between the write pole and notch, with the gap being formed of a nonmagnetic mask film, such as alumina, a nonmagnetic metal protective film and a nonmagnetic gap layer. The write pole has a trailing edge that has a width substantially defining the track width and that faces the front edge of the notch but is spaced from it by the gap. The write pole has nonmagnetic filler material, such as alumina, surrounding it except at its trailing edge, where it is in contact with the gap. A reactive ion beam etching (RIBE) process removes the filler material at the side edges of the write pole and thus widens the opening at the side edges. The nonmagnetic metal film protects the underlying mask film and write pole during the widening of the opening. The gap layer and trailing shield notch are deposited into a widened opening above the write pole, so the sides of the notch diverge to cause the generally trapezoidal shape.

摘要翻译： 垂直磁记录写头具有写极，梯形后屏蔽切口和写极与凹口之间的间隙，间隙由非磁性掩模膜形成，例如氧化铝，非磁性金属保护膜和 非磁隙层。 写极具有后缘，其具有基本上限定轨道宽度的宽度，并且面向凹口的前边缘，但是与间隙隔开。 写极具有非磁性填充材料，例如氧化铝，除了在其后缘处与间隙接触的位置之外围绕它。 反应离子束蚀刻（RIBE）工艺去除了写极的侧边缘处的填充材料，从而加宽了侧边缘处的开口。 非磁性金属膜在开口扩大期间保护下面的掩模膜和写极。 间隙层和后屏蔽切口沉积在写极上方的加宽开口中，因此凹口的侧面发散以引起大致梯形的形状。

公开(公告)号：US07788797B2

公开(公告)日：2010-09-07

申请号：US11735894

申请日：2007-04-16

申请人： John I. Kim ,  Aron Pentek

发明人： John I. Kim ,  Aron Pentek

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/1278 ,  G11B5/11 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/3163 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for making a perpendicular magnetic recording write head that has a write pole, a trapezoidal-shaped trailing shield notch, and a gap between the write pole and notch uses a reactive ion beam etching (RIBE) process in CHF3 that removes filler material at the side edges of the write pole and thus widens the opening at the side edges. The gap is formed of a nonmagnetic mask film, such as alumina, a nonmagnetic metal protective film and a nonmagnetic gap layer. The nonmagnetic metal film is substantially less reactive to CHF3 than the filler material and protects the underlying mask film and write pole during the widening of the opening. The gap layer and trailing shield notch are deposited into a widened opening above the write pole, so the sides of the notch diverge to cause the generally trapezoidal shape.

摘要翻译： 用于制造具有写入极，梯形尾部屏蔽切口以及写入极和凹口之间的间隙的垂直磁记录写头的方法使用在CHF 3中的反应离子束蚀刻（RIBE）工艺，该方法除去填充材料 写极的侧边缘，从而使侧边缘处的开口变宽。 间隙由非磁性掩模膜形成，例如氧化铝，非磁性金属保护膜和非磁性间隙层。 非磁性金属膜与填充材料基本上比CHF3反应性低，并且在开口加宽期间保护下面的掩模膜和写极。 间隙层和后屏蔽切口沉积在写极上方的加宽开口中，因此凹口的侧面发散以引起大致梯形的形状。