发明申请
- 专利标题: Liquid supply method and apparatus
- 专利标题(中): 液体供应方法和装置
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申请号: US10574954申请日: 2004-10-15
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公开(公告)号: US20070125423A1公开(公告)日: 2007-06-07
- 发明人: Toshikazu Suganuma , Yasushi Tomita , Kazunari Sakai , Naoki Hada , Katsuhiko Kazama
- 申请人: Toshikazu Suganuma , Yasushi Tomita , Kazunari Sakai , Naoki Hada , Katsuhiko Kazama
- 优先权: JP2003-361174 20031021
- 国际申请: PCT/JP04/15644 WO 20041015
- 主分类号: E03B1/00
- IPC分类号: E03B1/00
摘要:
There is provided a liquid supply method in which, when preparing a solution that can be used as washing water and the like by supplying a minute amount of chemicals and the like to ultrapure water, the amount of supply solution that is supplied can be accurately determined. In this liquid supply method, a solution is prepared by supplying a supply liquid to a primary fluid that is circulating in a primary fluid circulation tube (2). This liquid supply method uses a liquid supply apparatus (1) that includes: a supply section (3) that delivers the supply liquid; and a supply liquid circulation tube (4) that causes the supply liquid to flow from the supply section (3) to the primary fluid circulation tube (2), the internal diameter of the supply liquid circulation tube (4) being between 0.01 and 1 mm. When the supply solution is supplied from the supply section (3) to the primary fluid circulation tube (2) via the supply liquid circulation tube (4), a pressure P1 of the supply liquid in the supply section (3) and a pressure P2 of the primary fluid in the primary fluid circulation tube satisfy the formula P1−P2>0.
公开/授权文献
- US08171956B2 Liquid supply method and apparatus 公开/授权日:2012-05-08
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