公开(公告)号：US08171956B2

公开(公告)日：2012-05-08

申请号：US10574954

申请日：2004-10-15

申请人： Toshikazu Suganuma ,  Yasushi Tomita ,  Kazunari Sakai ,  Naoki Hada ,  Katsuhiko Kazama

发明人： Toshikazu Suganuma ,  Yasushi Tomita ,  Kazunari Sakai ,  Naoki Hada ,  Katsuhiko Kazama

IPC分类号： G05D11/02 ,  F04F5/02

CPC分类号： B01F5/0495 ,  B01J4/02 ,  B01L3/0293 ,  Y10T137/0329 ,  Y10T137/2076 ,  Y10T137/87676

摘要： There is provided a liquid supply method in which, when preparing a solution that can be used as washing water and the like by supplying a minute amount of chemicals and the like to ultrapure water, the amount of supply solution that is supplied can be accurately determined. In this liquid supply method, a solution is prepared by supplying a supply liquid to a primary fluid that is circulating in a primary fluid circulation tube (2). This liquid supply method uses a liquid supply apparatus (1) that includes: a supply section (3) that delivers the supply liquid; and a supply liquid circulation tube (4) that causes the supply liquid to flow from the supply section (3) to the primary fluid circulation tube (2), the internal diameter of the supply liquid circulation tube (4) being between 0.01 and 1 mm. When the supply solution is supplied from the supply section (3) to the primary fluid circulation tube (2) via the supply liquid circulation tube (4), a pressure P1 of the supply liquid in the supply section (3) and a pressure P2 of the primary fluid in the primary fluid circulation tube satisfy the formula P1−P2>0.

摘要翻译： 提供了一种液体供给方法，其中通过向超纯水中供应少量化学物质等制备可用作洗涤水等的溶液时，可以精确地确定供给溶液的量 。 在该液体供给方法中，通过向在一次流体循环管（2）中循环的一次流体供给供给液来制备溶液。 该液体供给方法使用液体供给装置（1），其包括：输送供给液的供给部（3） 以及使供给液从供给部（3）流向主流体循环管（2）的供给液循环管（4），供给液循环管（4）的内径为0.01〜1 mm。 当从供应部分（3）经由供给液体循环管（4）将供给溶液供应到主流体循环管（2）时，供给部（3）中的供给液的压力P1和压力P2 的初级流体循环管中的主要流体满足公式P1-P2> 0。

公开(公告)号：US20070125423A1

公开(公告)日：2007-06-07

申请号：US10574954

申请日：2004-10-15

申请人： Toshikazu Suganuma ,  Yasushi Tomita ,  Kazunari Sakai ,  Naoki Hada ,  Katsuhiko Kazama

发明人： Toshikazu Suganuma ,  Yasushi Tomita ,  Kazunari Sakai ,  Naoki Hada ,  Katsuhiko Kazama

IPC分类号： E03B1/00

CPC分类号： B01F5/0495 ,  B01J4/02 ,  B01L3/0293 ,  Y10T137/0329 ,  Y10T137/2076 ,  Y10T137/87676

摘要： There is provided a liquid supply method in which, when preparing a solution that can be used as washing water and the like by supplying a minute amount of chemicals and the like to ultrapure water, the amount of supply solution that is supplied can be accurately determined. In this liquid supply method, a solution is prepared by supplying a supply liquid to a primary fluid that is circulating in a primary fluid circulation tube (2). This liquid supply method uses a liquid supply apparatus (1) that includes: a supply section (3) that delivers the supply liquid; and a supply liquid circulation tube (4) that causes the supply liquid to flow from the supply section (3) to the primary fluid circulation tube (2), the internal diameter of the supply liquid circulation tube (4) being between 0.01 and 1 mm. When the supply solution is supplied from the supply section (3) to the primary fluid circulation tube (2) via the supply liquid circulation tube (4), a pressure P1 of the supply liquid in the supply section (3) and a pressure P2 of the primary fluid in the primary fluid circulation tube satisfy the formula P1−P2>0.

摘要翻译： 提供了一种液体供给方法，其中通过向超纯水中供应少量化学物质等制备可用作洗涤水等的溶液时，可以精确地确定供给溶液的量 。 在该液体供给方法中，通过向在一次流体循环管（2）中循环的一次流体供给供给液来制备溶液。 该液体供给方法使用液体供给装置（1），其包括：输送供给液的供给部（3） 以及使供给液从供给部（3）流向主流体循环管（2）的供给液循环管（4），供给液循环管（4）的内径为0.01〜1 mm。 当从供应部分（3）经由供给液体循环管（4）将供给溶液供应到主流体循环管（2）时，供给部（3）中的供给液的压力P1和压力P2 的初级流体循环管中的主要流体满足公式P1-P2> 0。