发明申请
- 专利标题： Multi-zone resistive heater
- 专利标题（中）： 多区电阻加热器
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申请号： US11293626申请日： 2005-12-01
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公开(公告)号： US20070125762A1公开(公告)日： 2007-06-07
- 发明人: Anqing Cui , Binh Tran , Alexander Tam , Jacob Smith , R. Iyer , Joseph Yudovsky , Sean Seutter
- 申请人： Anqing Cui , Binh Tran , Alexander Tam , Jacob Smith , R. Iyer , Joseph Yudovsky , Sean Seutter
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 主分类号： H05B3/68
- IPC分类号： H05B3/68
摘要：
Apparatus, reactors, and methods for heating substrates are disclosed. The apparatus comprises a stage comprising a body and a surface having an area to support a substrate, a shaft coupled to the stage, a first heating element disposed within a central region of the body of the stage, and at least second and third heating elements disposed within the body of the stage, the at least second and third heating elements each partially surrounding the first heating element and wherein the at least second and third heating elements are circumferentially adjacent to each other.
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