发明申请
- 专利标题: Probe Card Assembly With A Mechanically Decoupled Wiring Substrate
- 专利标题(中): 具有机械解耦接线基板的探头卡组件
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申请号: US11551545申请日: 2006-10-20
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公开(公告)号: US20070126440A1公开(公告)日: 2007-06-07
- 发明人: Eric Hobbs , Alexander Slocum , Benjamin Eldridge , Keith Breinlinger , Shawn Powell
- 申请人: Eric Hobbs , Alexander Slocum , Benjamin Eldridge , Keith Breinlinger , Shawn Powell
- 申请人地址: US CA Livermore
- 专利权人: FORMFACTOR, INC.
- 当前专利权人: FORMFACTOR, INC.
- 当前专利权人地址: US CA Livermore
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
A probe card assembly can comprise a probe head assembly and a wiring substrate. The probe head assembly can comprise a plurality of probes disposed to contact an electronic device disposed on a holder in a test housing. The wiring substrate can include an electrical interface to a test controller and a plurality of electrical wiring composing electrical paths between the electrical interface and ones of the probes, and the wiring substrate can comprise a first portion on which the electrical interface is disposed and a second portion composing the probe head assembly. The second portion of the wiring substrate can be moveable with respect to the first portion of the wiring substrate.
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