发明申请
US20070132974A1 Environmental system including vacuum scavenge for an immersion lithography apparatus 有权
包括用于浸没式光刻设备的真空清除的环境系统

  • 专利标题: Environmental system including vacuum scavenge for an immersion lithography apparatus
  • 专利标题(中): 包括用于浸没式光刻设备的真空清除的环境系统
  • 申请号: US11701378
    申请日: 2007-02-02
  • 公开(公告)号: US20070132974A1
    公开(公告)日: 2007-06-14
  • 发明人: Andrew HazeltonMichael Sogard
  • 申请人: Andrew HazeltonMichael Sogard
  • 申请人地址: JP Tokyo
  • 专利权人: Nikon Corporation
  • 当前专利权人: Nikon Corporation
  • 当前专利权人地址: JP Tokyo
  • 主分类号: G03B27/42
  • IPC分类号: G03B27/42
Environmental system including vacuum scavenge for an immersion lithography apparatus
摘要:
A lithographic projection apparatus includes a liquid confinement structure extending along at least a part of a boundary of a space between a projection system and a substrate table, the space having a cross-sectional area smaller than the area of the substrate. The liquid confinement structure includes a first inlet to supply liquid, through which the patterned beam is projected, to the space, a first outlet to remove liquid after the liquid has passed under the projection system, a second inlet formed in a face of the structure, the face arranged to oppose a surface of the substrate, and located radially outward, with respect to an optical axis of the projection system, of the space to supply gas, and a second outlet formed in the face and located radially outward, with respect to an optical axis of the projection system, of the second inlet to remove gas.
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