Invention Application
- Patent Title: Sputtering apparatus
- Patent Title (中): 溅射装置
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Application No.: US11639223Application Date: 2006-12-15
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Publication No.: US20070138009A1Publication Date: 2007-06-21
- Inventor: Jin Lee , Hyuk Yoon , Hwan Yoo , Byeong Hwang
- Applicant: Jin Lee , Hyuk Yoon , Hwan Yoo , Byeong Hwang
- Applicant Address: KR Seoul KR Daegu-si KR Seoul
- Assignee: LG.PHILIPS LCD CO., LTD.,AVACO CO., Ltd.,LG Electronics Inc.
- Current Assignee: LG.PHILIPS LCD CO., LTD.,AVACO CO., Ltd.,LG Electronics Inc.
- Current Assignee Address: KR Seoul KR Daegu-si KR Seoul
- Priority: KR10-2005-0124312 20051216
- Main IPC: C23C14/00
- IPC: C23C14/00

Abstract:
A sputtering apparatus includes a cathode for generating a plasma; one or more target on a front surface of the cathode; a plurality of magnets at a first distance from a back of the cathode for generating a first magnetic field intensity in the plasma; and a plurality of guide members for moving the individual magnets in a direction substantially perpendicular to the cathode to a second distance from the back of the cathode to change the first magnetic field intensity to a second magnetic field intensity.
Information query
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