发明申请
- 专利标题： THREE DIMENSIONAL MICROSTRUCTURES AND METHODS FOR MAKING THREE DIMENSIONAL MICROSTRUCTURES
- 专利标题（中）： 三维微结构的三维微结构和方法制作三维微结构
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申请号： US11306291申请日： 2005-12-21
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公开(公告)号： US20070141743A1公开(公告)日： 2007-06-21
- 发明人: Gaetan Mathieu , Treliant Fang , Eric Hobbs
- 申请人： Gaetan Mathieu , Treliant Fang , Eric Hobbs
- 申请人地址： US CA Livermore
- 专利权人： FORMFACTOR, INC.
- 当前专利权人： FORMFACTOR, INC.
- 当前专利权人地址： US CA Livermore
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
Systems and methods for depositing a plurality of droplets in a three-dimensional array are disclosed. The array can comprise a first type of droplets disposed to form a support structure and a second type of droplets forming a conductive seed layer on the support structure. A structure material can be electrodeposited onto the seed layer to create a three-dimensional structure.
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