In one embodiment, a method for upfront specification of lot process parameters to enable automated processing is disclosed. The method comprises specifying a combination of one or more process parameters in a template associated with a tool, the process parameters associated with a process flow for a lot to be processed by the tool, and subsequent to the specifying, automatically retrieving by the tool the specified combination of process parameters at least one of when the lot arrives at the tool for processing, during processing of the lot by the tool, and after processing of the lot by the tool, wherein automatically retrieving includes retrieving the specified combination without human intervention. Other embodiments are also described.