发明申请
US20070148346A1 Systems and methods for deposition of graded materials on continuously fed objects
审中-公开
将渐变材料沉积在连续供给的物体上的系统和方法
- 专利标题: Systems and methods for deposition of graded materials on continuously fed objects
- 专利标题(中): 将渐变材料沉积在连续供给的物体上的系统和方法
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申请号: US11315248申请日: 2005-12-23
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公开(公告)号: US20070148346A1公开(公告)日: 2007-06-28
- 发明人: Tae Won Kim , Anil Duggal , Paul McConnelee , Michael Rumsey , Marc Schaepkens , Reinhold Wirth , Min Yan , Ahmet Erlat , Thomas Feist
- 申请人: Tae Won Kim , Anil Duggal , Paul McConnelee , Michael Rumsey , Marc Schaepkens , Reinhold Wirth , Min Yan , Ahmet Erlat , Thomas Feist
- 专利权人: General Electric Company
- 当前专利权人: General Electric Company
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; H05H1/24
摘要:
Embodiments of the invention include a deposition machine that allows for continuous deposition of an object or substrate with a coating having a graded composition. The deposition machine includes a deposition chamber separated into a plurality of chamber areas by a baffle having an opening. The opening allows for migration of deposition material from one chamber area to another, allowing for a graded composition coating to be deposited on the object or substrate. Other embodiments include a system for forming an electronic device and a system and method for forming a graded composition on an object.
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