发明申请
- 专利标题: Acceleration sensor element and acceleration sensor
- 专利标题(中): 加速度传感器元件和加速度传感器
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申请号: US11636583申请日: 2006-12-11
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公开(公告)号: US20070151339A1公开(公告)日: 2007-07-05
- 发明人: Jun Watanabe
- 申请人: Jun Watanabe
- 申请人地址: JP TOKYO
- 专利权人: EPSON TOYOCOM CORPORATION
- 当前专利权人: EPSON TOYOCOM CORPORATION
- 当前专利权人地址: JP TOKYO
- 优先权: JP2005-358565 20051213
- 主分类号: G01P15/09
- IPC分类号: G01P15/09 ; G01P1/04
摘要:
An objective is to provide an acceleration sensor element that has a high detection sensitivity and that realizes an accurate measurement of acceleration; and an acceleration sensor including this acceleration sensor element to realize a smaller size and a thinner thickness. An acceleration sensor element 10 comprises a quartz, has a thickness in a Z axis direction, and is formed in a quartz substrate 20 developed in an orthogonal XY plane. A thin-walled section of a bottom section of a concave section 28 of the quartz substrate 20 has a double-ended vibrating reed 30 in which a pair of vibration arms 31 and 35 extend in a Y axis direction. When acceleration in a Z axis direction is applied while this double-ended vibrating reed 30 having bending vibration, the acceleration is detected based on a change in a resonance frequency caused when the double-ended vibrating reed 30 deflects in the Z direction.
公开/授权文献
- US07565840B2 Acceleration sensor element and acceleration sensor 公开/授权日:2009-07-28
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