Invention Application
US20070152263A1 DYNAMIC RANDOM ACCESS MEMORY CELL LAYOUT AND FABRICATION METHOD THEREOF
审中-公开
动态随机访问存储单元布局及其制造方法
- Patent Title: DYNAMIC RANDOM ACCESS MEMORY CELL LAYOUT AND FABRICATION METHOD THEREOF
- Patent Title (中): 动态随机访问存储单元布局及其制造方法
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Application No.: US11687573Application Date: 2007-03-16
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Publication No.: US20070152263A1Publication Date: 2007-07-05
- Inventor: Ming-Cheng Chang , Tieh-Chiang Wu , Yi-Nan Chen , Jeng-Ping Lin
- Applicant: Ming-Cheng Chang , Tieh-Chiang Wu , Yi-Nan Chen , Jeng-Ping Lin
- Applicant Address: TW TAOYUAN
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW TAOYUAN
- Priority: TW92124187 20030902
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
A dynamic random access memory (DRAM) cell layout for arranging deep trenches and active areas and a fabrication method thereof. An active area comprises two vertical transistors, a common bitline contact and two deep trenches. The first vertical transistor is formed on a region where the first deep trench is partially overlapped with the first gate conductive line. The second vertical transistor is formed on a region where the second deep trench is partially overlapped with the second gate conductive line.
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