发明申请
US20070152352A1 MICRO-FABRICATED DEVICE WITH THERMOELECTRIC DEVICE AND METHOD OF MAKING
审中-公开
具有热电装置的微型制造装置及其制造方法
- 专利标题： MICRO-FABRICATED DEVICE WITH THERMOELECTRIC DEVICE AND METHOD OF MAKING
- 专利标题（中）： 具有热电装置的微型制造装置及其制造方法
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申请号： US11685518申请日： 2007-03-13
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公开(公告)号： US20070152352A1公开(公告)日： 2007-07-05
- 发明人: James McKinnell , John Liebeskind , Chien-Hua Chen
- 申请人： James McKinnell , John Liebeskind , Chien-Hua Chen
- 主分类号： H01L23/34
- IPC分类号： H01L23/34
摘要：
A micro-fabricated device, includes a support structure having an aperture formed therein, and a device substrate disposed within the aperture. The micro-fabricated device further includes a thermally isolating structure thermally coupling the device substrate to the support structure. The thermally isolating structure includes at least one n-doped region and at least one p-doped region formed on or in the thermally isolating structure and separated from each other. In addition, the thermally isolating structure includes an electrical interconnect connecting at least one n-doped region and at least one p-doped region, forming an integrated thermoelectric device.
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