Invention Application
US20070152754A1 Method of fabricating phase change RAM including a fullerene layer
有权
制造包含富勒烯层的相变RAM的方法
- Patent Title: Method of fabricating phase change RAM including a fullerene layer
- Patent Title (中): 制造包含富勒烯层的相变RAM的方法
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Application No.: US11604824Application Date: 2006-11-28
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Publication No.: US20070152754A1Publication Date: 2007-07-05
- Inventor: Yoon-ho Khang , Sang-Mock Lee , Jin-seo Noh , Woong-Chul Shin
- Applicant: Yoon-ho Khang , Sang-Mock Lee , Jin-seo Noh , Woong-Chul Shin
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Priority: KR10-2006-0000472 20060103
- Main IPC: H03G3/10
- IPC: H03G3/10

Abstract:
A method of fabricating a phase change RAM (PRAM) having a fullerene layer is provided. The method of fabricating the PRAM may include forming a bottom electrode, forming an interlayer dielectric film covering the bottom electrode, and forming a bottom electrode contact hole exposing a portion of the bottom electrode in the interlayer dielectric film, forming a bottom electrode contact plug by filling the bottom electrode contact hole with a plug material, forming a fullerene layer on a region including at least an upper surface of the bottom electrode contact plug and sequentially stacking a phase change layer and an upper electrode on the fullerene layer. The method may further include forming a switching device on a substrate and a bottom electrode connected to the switching device, forming an interlayer dielectric film covering the bottom electrode and forming a bottom electrode contact hole exposing a portion of the bottom electrode in the interlayer dielectric film.
Public/Granted literature
- US07572662B2 Method of fabricating phase change RAM including a fullerene layer Public/Granted day:2009-08-11
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