发明申请
US20070153033A1 Micro-droplet injection apparatus and injecting process using the same 有权
微滴注射装置和使用其的注射方法

  • 专利标题: Micro-droplet injection apparatus and injecting process using the same
  • 专利标题(中): 微滴注射装置和使用其的注射方法
  • 申请号: US11488775
    申请日: 2006-07-19
  • 公开(公告)号: US20070153033A1
    公开(公告)日: 2007-07-05
  • 发明人: Kuo-Hua WuChao-Kai ChengChih-Jian Lin
  • 申请人: Kuo-Hua WuChao-Kai ChengChih-Jian Lin
  • 优先权: TW094147327 20051229
  • 主分类号: B41J25/308
  • IPC分类号: B41J25/308
Micro-droplet injection apparatus and injecting process using the same
摘要:
A micro-droplet injection apparatus and the injecting process using the same are provided for fabricating a micro-element. The apparatus includes an injection module, a moving stage module, an image detection module, and a temperature controlling module. The injection module is provided for injecting a micro-droplet on a substrate carried on the moving stage module, and the substrate is detected by the image detection module for detecting the relative position and inclined angle between the substrate and a injection head of the injection module. The temperature controlling module is provided for controlling the surface temperature of the substrate, such that the temperature of the substrate and the micro-droplets is balanced, and then the surface flatness of the film plated by micro-droplets is improved. The apparatus operates according to processing requirements of different substrates, achieving a stage multiplex function, and raising operation efficiency.
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