发明申请
US20070154844A1 FLUORINATED COMPOUND, FLUOROPOLYMER, RESIST COMPOSITION, AND COMPOSITION FOR RESIST PROTECTIVE FILM
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氟化合物,氟聚合物,耐腐蚀组合物和耐腐蚀膜的组合物
- 专利标题: FLUORINATED COMPOUND, FLUOROPOLYMER, RESIST COMPOSITION, AND COMPOSITION FOR RESIST PROTECTIVE FILM
- 专利标题(中): 氟化合物,氟聚合物,耐腐蚀组合物和耐腐蚀膜的组合物
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申请号: US11626913申请日: 2007-01-25
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公开(公告)号: US20070154844A1公开(公告)日: 2007-07-05
- 发明人: Yoko TAKEBE , Masataka Eda , Osamu Yokokoji , Takashi Sasaki
- 申请人: Yoko TAKEBE , Masataka Eda , Osamu Yokokoji , Takashi Sasaki
- 申请人地址: JP Chiyoda-ku
- 专利权人: ASAHI GLASS COMPANY, LIMITED
- 当前专利权人: ASAHI GLASS COMPANY, LIMITED
- 当前专利权人地址: JP Chiyoda-ku
- 优先权: JP2004-223363 20040730; JP2004-340595 20041125; JP2005-151028 20050524
- 主分类号: C07C57/18
- IPC分类号: C07C57/18 ; G03C5/00 ; C07C21/18 ; C08F18/20
摘要:
To provide a fluoropolymer having functional groups and having high transparency in a wide wavelength range, and a resist composition and a composition for a resist protective film, comprising the fluoropolymer. A fluoropolymer having monomer units formed by cyclopolymerization of a fluorinated diene represented by the formula (1): CF2═CFCF2C(CF3)(OR1)—(CH2)nCR2═CHR3 (1) wherein R1 is a hydrogen atom, an alkyl group having at most 20 carbon atoms, or (CH2)aCOOR4 (wherein a is 0 or 1, and R4 is a hydrogen atom or an alkyl group having at most 20 carbon atoms), each of R2 and R3, which are independent of each other, is a hydrogen atom or an alkyl group having at most 12 carbon atoms, and n is 0 or 2, provided that when n is 0, at least one of R1, R2 and R3 is other than a hydrogen atom.
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