发明申请
US20070157876A1 Apparatus for production of crystal of group III element nitride and process for producing crystal of group III element nitride
有权
用于生产III族元素氮化物晶体的装置和用于生产III族元素氮化物晶体的方法
- 专利标题: Apparatus for production of crystal of group III element nitride and process for producing crystal of group III element nitride
- 专利标题(中): 用于生产III族元素氮化物晶体的装置和用于生产III族元素氮化物晶体的方法
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申请号: US10587223申请日: 2005-04-27
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公开(公告)号: US20070157876A1公开(公告)日: 2007-07-12
- 发明人: Hisashi Minemoto , Yasuo Kitaoka , Isao Kidoguchi , Yusuke Mori , Fumio Kawamura , Takatomo Sasaki , Hidekazu Umeda , Yasuhito Takahashi
- 申请人: Hisashi Minemoto , Yasuo Kitaoka , Isao Kidoguchi , Yusuke Mori , Fumio Kawamura , Takatomo Sasaki , Hidekazu Umeda , Yasuhito Takahashi
- 申请人地址: JP Suita-Shi, Osaka 565-0871 JP Osaka 571-8501
- 专利权人: Yusuke Mori,MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 当前专利权人: Yusuke Mori,MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 当前专利权人地址: JP Suita-Shi, Osaka 565-0871 JP Osaka 571-8501
- 优先权: JP2004-130620 20040427
- 国际申请: PCT/JP05/08072 WO 20050427
- 主分类号: C30B11/00
- IPC分类号: C30B11/00 ; C30B23/00 ; C30B21/06 ; B01J3/04
摘要:
A manufacturing apparatus of Group III nitride crystals and a method for manufacturing Group III nitride crystals are provided, by which high quality crystals can be manufactured. For instance, crystals are grown using the apparatus of the present invention as follows. A crystal raw material (131) and gas containing nitrogen are introduced into a reactor vessel (120), to which heat is applied by a heater (110), and crystals are grown in an atmosphere of pressure applied thereto. The gas is introduced from a gas supplying device (180) to the reactor vessel (120) through a gas inlet of the reactor vessel, and then is exhausted to the inside of a pressure-resistant vessel (102) through a gas outlet of the reactor vessel. Since the gas is introduced directly to the reactor vessel (120) without passing through the pressure-resistant vessel (102), the mixture of impurities attached to the pressure-resistant vessel (102) and the like into the site of the crystal growth can be prevented. Further, since the gas flows through the reactor vessel (120), there is no aggregation of an evaporating alkali metal, etc., at the gas inlet or the like, and such an alkali metal does not flow into the gas supplying device (180). As a result, the quality of Group III nitride crystals obtained can be improved.
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