发明申请
- 专利标题: Replaceable Parylene Membranes For Nanocalorimeter
- 专利标题(中): 用于纳米尺度计的可更换的Parylene膜
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申请号: US11686328申请日: 2007-03-14
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公开(公告)号: US20070158016A1公开(公告)日: 2007-07-12
- 发明人: Eric Peeters , Gregory Anderson
- 申请人: Eric Peeters , Gregory Anderson
- 申请人地址: US CA Palo Alto
- 专利权人: Palo Alto Research Center Incorporated
- 当前专利权人: Palo Alto Research Center Incorporated
- 当前专利权人地址: US CA Palo Alto
- 主分类号: B32B37/00
- IPC分类号: B32B37/00 ; B32B38/00 ; B29C47/00
摘要:
A measurement operation, such as a calorimetry measurement, is performed using a measurement array and a replaceable passivation membrane (e.g., a parylene membrane). The passivation membrane is used to cover the measurement array to provide temporary electrical and chemical passivation, while still allowing measurement of the parameter of interest (e.g., temperature, in a calorimetry measurement). By only replacing the membrane instead of the entire measurement array between measurement operations, the cost of the measurements can be significantly reduced over conventional methods. The passivation membrane can be mounted on a frame to simplify handling of the membrane.
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