发明申请
- 专利标题: Field effect transistor and method for producing the same
- 专利标题(中): 场效应晶体管及其制造方法
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申请号: US10587845申请日: 2005-01-28
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公开(公告)号: US20070158700A1公开(公告)日: 2007-07-12
- 发明人: Risho Koh , Katsuhiko Tanaka , Kiyoshi Takeuchi
- 申请人: Risho Koh , Katsuhiko Tanaka , Kiyoshi Takeuchi
- 专利权人: NEC CORPORATION
- 当前专利权人: NEC CORPORATION
- 优先权: JP2004-024722 20040130
- 国际申请: PCT/JP05/01207 WO 20050128
- 主分类号: H01L29/76
- IPC分类号: H01L29/76
摘要:
A field effect transistor comprising: a semiconductor layer projecting from the plane of a base; a gate electrode provided on opposite side surfaces of the semiconductor layer; a gate insulating film interposed between the gate electrode and the side surface of the semiconductor layer; and source/drain regions where a first conductivity type impurity is introduced, wherein the semiconductor layer has a channel forming region in a portion sandwiched between the source/drain regions, and has in the upper part of the semiconductor layer in the channel forming region a channel impurity concentration adjusting region of which the concentration of a second conductivity type impurity is higher than that in the lower part of the semiconductor layer, and in the channel impurity concentration adjusting region, a channel is formed in a side surface portion facing the gate insulating film of the semiconductor layer in the channel impurity concentration adjusting region in a state of operation in which a signal voltage is applied to the gate electrode.
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