发明申请
- 专利标题: Spin transistor and manufacturing method thereof
- 专利标题(中): 自旋晶体管及其制造方法
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申请号: US11409212申请日: 2006-04-24
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公开(公告)号: US20070166841A1公开(公告)日: 2007-07-19
- 发明人: Ying-Wen Huang , Chi-Kuen Lo , Lan-Chin Hsieh , Der-Ray Huang , Yeong-Der Yao , Jau-Jiu Ju
- 申请人: Ying-Wen Huang , Chi-Kuen Lo , Lan-Chin Hsieh , Der-Ray Huang , Yeong-Der Yao , Jau-Jiu Ju
- 优先权: TW094147557 20051230
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A spin transistor and a manufacturing method thereof are provided. The method includes defining a required area on a substrate by lithography; forming a doping area by ion-implantation, and forming a magnetoresistive film on the substrate. Finally, the method produces a spin transistor with the emitter, the base, and the collector in the same plane surface. The manufacturing method integrates the emitter, the base, and the collector into one plane, so that miniaturization of the spin transistor is achieved, and it is advantageous for the integration and subsequent packaging of the spin transistor and integrated circuit elements.
公开/授权文献
- US07470551B2 Spin transistor and manufacturing method thereof 公开/授权日:2008-12-30
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