发明申请
US20070170487A1 Storage capacitor for semiconductor memory cells and method of manufacturing a storage capacitor
失效
用于半导体存储单元的存储电容器和制造存储电容器的方法
- 专利标题: Storage capacitor for semiconductor memory cells and method of manufacturing a storage capacitor
- 专利标题(中): 用于半导体存储单元的存储电容器和制造存储电容器的方法
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申请号: US11339744申请日: 2006-01-25
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公开(公告)号: US20070170487A1公开(公告)日: 2007-07-26
- 发明人: Johannes Heitmann , Peter Moll , Odo Wunnicke , Till Schloesser
- 申请人: Johannes Heitmann , Peter Moll , Odo Wunnicke , Till Schloesser
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L21/20
摘要:
A capacitor for a dynamic semiconductor memory cell, a memory and method of making a memory is disclosed. In one embodiment, a storage electrode of the capacitor has a pad-shaped lower section and a cup-shaped upper section, which is placed on top of the lower section. A lower section of a backside electrode encloses the pad-shaped section of the storage electrode. An upper section of the backside electrode is enclosed by the cup-shaped upper section of the storage electrode. A first capacitor dielectric separates the lower sections of the backside and the storage electrodes. A second capacitor dielectric separates the upper sections of the backside and the storage electrodes. The electrode area of the capacitor is enlarged while the requirements for the deposition of the capacitor dielectric are relaxed. Aspect ratios for deposition and etching processes are reduced.
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