Invention Application
- Patent Title: Wafer encapsulated microelectromechanical structure and method of manufacturing same
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Application No.: US11336521Application Date: 2006-01-20
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Publication No.: US20070170528A1Publication Date: 2007-07-26
- Inventor: Aaron Partridge , Markus Lutz , Pavan Gupta
- Applicant: Aaron Partridge , Markus Lutz , Pavan Gupta
- Main IPC: H01L29/84
- IPC: H01L29/84

Abstract:
There are many inventions described and illustrated herein. In one aspect, the present inventions relate to devices, systems and/or methods of encapsulating and fabricating electromechanical structures or elements, for example, accelerometer, gyroscope or other transducer (for example, pressure sensor, strain sensor, tactile sensor, magnetic sensor and/or temperature sensor), filter or resonator. The fabricating or manufacturing microelectromechanical systems of the present invention, and the systems manufactured thereby, employ wafer bonding encapsulation techniques.
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