发明申请
- 专利标题： Apparatus for testing semiconductor test system and method thereof
- 专利标题（中）： 半导体测试系统测试装置及其方法
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申请号： US11635745申请日： 2006-12-07
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公开(公告)号： US20070170939A1公开(公告)日： 2007-07-26
- 发明人: Byung-Wook Park , Byeong-Hwan Cho , Young-Dong Nam , Bo-Yeon Kim
- 申请人： Byung-Wook Park , Byeong-Hwan Cho , Young-Dong Nam , Bo-Yeon Kim
- 专利权人： Samsung Electronics Co., Ltd.
- 当前专利权人： Samsung Electronics Co., Ltd.
- 优先权： KR10-2006-0007418 20060124
- 主分类号： G01R31/02
- IPC分类号： G01R31/02 ; G01R31/26
摘要：
A test system includes a tester configured to perform a test operation on a semiconductor wafer; an interface unit configured to interface between the tester and the semiconductor wafer; and a conductive plate configured to provide the interface unit with a current path when the interface unit is determined to be defective.
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