发明申请
US20070176498A1 Ultrasonic wave generating device 有权
超声波发生装置

Ultrasonic wave generating device
摘要:
An ultrasonic wave generating device includes a substrate, a heat insulation layer on the substrate, a membrane heating portion on the heat insulation layer, and a membrane oscillator on the heating portion. The heating portion is electrically driven with a predetermined period, and produces heat for thermally displacing a surface of the oscillator. The oscillator receives a temperature variation with the predetermined period from the heating portion, and oscillates so as to generate ultrasonic waves.
公开/授权文献
信息查询
0/0