发明申请
US20070180916A1 Capacitive micromachined ultrasound transducer and methods of making the same
审中-公开
电容式微机械超声换能器及其制作方法
- 专利标题： Capacitive micromachined ultrasound transducer and methods of making the same
- 专利标题（中）： 电容式微机械超声换能器及其制作方法
-
申请号： US11350424申请日： 2006-02-09
-
公开(公告)号： US20070180916A1公开(公告)日： 2007-08-09
- 发明人: Wei-Cheng Tian , Lowell Smith , Ching-Yeu Wei , Robert Wodnicki , Rayette Fisher , David Mills , Stanley Chu , Hyon-Jin Kwon
- 申请人： Wei-Cheng Tian , Lowell Smith , Ching-Yeu Wei , Robert Wodnicki , Rayette Fisher , David Mills , Stanley Chu , Hyon-Jin Kwon
- 专利权人： General Electric Company
- 当前专利权人： General Electric Company
- 主分类号： G01H11/06
- IPC分类号： G01H11/06 ; H04R31/00 ; G01R3/00
摘要：
A method of making a capacitive micromachined ultrasound transducer cell is provided. The method includes providing a carrier substrate, where the carrier substrate comprises glass. The step of providing the glass substrate may include forming vias in the glass substrate. Further, the method includes providing a membrane such that at least one of the carrier substrate, or the membrane comprises support posts, where the support posts are configured to define a cavity depth. The method further includes bonding the membrane to the carrier substrate by using the support posts, where the carrier substrate, the membrane and the support posts define an acoustic cavity.
信息查询
