发明申请
US20070182965A1 Linked extendable gas observation system for infrared absorption spectroscopy
审中-公开
用于红外吸收光谱的连接可扩展气体观测系统
- 专利标题: Linked extendable gas observation system for infrared absorption spectroscopy
- 专利标题(中): 用于红外吸收光谱的连接可扩展气体观测系统
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申请号: US11529694申请日: 2006-09-28
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公开(公告)号: US20070182965A1公开(公告)日: 2007-08-09
- 发明人: Leonard Kamlet , Martin Spartz , Peter Rosenthal
- 申请人: Leonard Kamlet , Martin Spartz , Peter Rosenthal
- 申请人地址: US MA Wilmington
- 专利权人: MKS Instruments, Inc.
- 当前专利权人: MKS Instruments, Inc.
- 当前专利权人地址: US MA Wilmington
- 主分类号: G01N21/61
- IPC分类号: G01N21/61 ; G01N21/00
摘要:
A modular system for gas analysis has a first gas cell that receives and passes at least a portion of an infrared light beam through at least a portion of the first gas cell. A second gas cell disposed proximal to the first gas cell receives and passes at least a portion of the infrared light beam from the first gas cell through at least a portion of the second gas cell. At least a portion of the first gas cell and at least a portion of the second gas cell define a light path having an effective length. The system includes a means for adjusting the effective length of the light path to vary a property of the infrared light beam. Methods of making a variable effective length light path and methods of making a gas detector are also disclosed.
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