Invention Application
- Patent Title: Measuring probe, especially for a device for the measurement of the thickness of thin layers
- Patent Title (中): 测量探针,特别是用于测量薄层厚度的装置
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Application No.: US11599627Application Date: 2006-11-14
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Publication No.: US20070186434A1Publication Date: 2007-08-16
- Inventor: Helmut Fischer
- Applicant: Helmut Fischer
- Priority: DE102005054593.9 20051114
- Main IPC: G01B3/22
- IPC: G01B3/22

Abstract:
The invention relates to a Measuring probe for a device for the measurement of the thickness of thin layers, with a housing (14) comprising at least one sensor element (17), which is accepted along a longitudinal axis (16) of the housing (14) at least slightly movable to the housing (14) and with a contact spherical cap (21) assigned to the at least one sensor element (17) for setting the measuring probe (11) onto a surface of a measuring object, whereby in that the at least one sensor element (17) is accepted by a holding element (18)—along the longitudinal axis (16) of the housing (14)—which is designed spring-loaded resiliently and which is fastened on the housing (14).
Public/Granted literature
- US07472491B2 Measuring probe, especially for a device for the measurement of the thickness of thin layers Public/Granted day:2009-01-06
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