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公开(公告)号：US12146733B2
公开(公告)日：2024-11-19
申请号：US17426597
申请日：2020-05-25
Inventor： Rüdiger Mästle , Lars-Christian Anklamm
IPC: G01B11/06 , G01B11/02 , G01B21/04 , G01N21/3581 , G01N21/3586 , G01B11/26
Abstract: A measuring device comprises a Terahertz, THz, transmitter configured to emit a THz signal to an object to be measured and a THz receiver configured to receive a reflected portion of said THz signal that has been reflected by said object. The said THz transmitter and said THz receiver are arranged in a measuring head of said measuring device. The measuring device may vary a distance between said measuring head and said object to be measured, emit, by means of said THz transmitter, said THz signal to said object to be measured, receive said reflected portion of said THz signal, and determine a first parameter characterizing a detected signal proportional and/or related to said received reflected portion of said THz signal.
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公开(公告)号：US20220404140A1
公开(公告)日：2022-12-22
申请号：US17775564
申请日：2020-12-16
Inventor： Rüdiger Mästle
Abstract: An apparatus for transmitting and/or receiving terahertz, THz, radiation, comprising at least one terahertz element which is configured to generate and/or detect a THz signal, and at least one field-shaping element which in particular is assigned to the at least one terahertz element, wherein the at least one terahertz element is arranged in the region of a first surface of the field-shaping element.
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公开(公告)号：US11385151B2
公开(公告)日：2022-07-12
申请号：US16070617
申请日：2017-01-09
Inventor： Helmut Fischer
IPC: G01N3/46
Abstract: A measuring device for detection pf measurement signals during a penetrating movement of a penetrating member into a surface of a test object or during a sensing movement of the penetrating member on the surface of the test object. The measuring device includes a housing which accommodates a force generating device and on which a holding element is arranged remote from the force generating device, which holding element is movable relative to the housing at least in one direction along a longitudinal axis of the housing and which accommodates the penetrating member. The measuring device also includes at least one first measuring element for measuring the penetration depth of the penetrating member into the surface of the test object or a traversing movement of the penetrating member along the longitudinal axis relative to the housing during a sensing movement on the surface of the test object, wherein a transmission element is provided which extends between the force generating device and the penetrating member.
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公开(公告)号：US11062934B2
公开(公告)日：2021-07-13
申请号：US16901503
申请日：2020-06-15
Inventor： Werner Volz , Paul Boos
IPC: H01L21/683 , H01L21/687 , H01L21/677 , B25B11/00 , H01L21/67 , G01N23/223
Abstract: A vacuum chuck for clamping workpieces, in particular wafers, and a measuring device and a method for checking workpieces by way of X-ray fluorescent radiation. The vacuum chuck has a clamping plate having a support surface, having at least one suction connection arranged on a base body for connecting to a negative-pressure device and for clamping the workpiece on the clamping plate by negative pressure received by the base body and having several suction grooves arranged in the clamping plate and are open towards the support surface. The support surface has concentric suction grooves having a suction opening to which a negative-pressure line is connected or which is connected to a work channel. Each suction groove having a separate negative pressure, which is separate to the adjacent suction groove, is selectively controlled by a control valve by a control for supplying the respective negative pressure in the respective suction groove.
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公开(公告)号：US20210116344A1
公开(公告)日：2021-04-22
申请号：US16464395
申请日：2017-11-06
Inventor： HELMUT FISCHER
IPC: G01N3/46
Abstract: The invention relates to a measuring System, a measuring arrangement and a method for detecting measuring signals during a penetration movement of a penetration body (41) into a surface of a test body (14), in particular for hardness measurement or for determining the Scratch resistance of the surface of the test body (14), or for detecting measuring signals during a scanning movement of the penetration body (41) on the surface of the test body (14), in particular for determining the surface roughness, comprising a housing (47) provided with a power generating device (44) which is operatively connected to a penetration body (41) for generating a displacement movement of the penetration body (41) along a displacement axis (48) of the penetration body (41) and which actuates a penetration movement of the penetration body (41) into the surface to be examined of the test body (14), or which positions the penetration body (41) on the surface of the test body (14) for scanning, and further comprising at least one first measuring device (78) for measuring the penetration depth in the surface of the test body (14) or a displacement movement of the penetration body (41) along its displacement axis (48) during a scanning movement on the surface of the test body (14), wherein the power generating device (44) actuates the displacement movement of the penetration body (41) by means of a magnetic force.
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Patent Agency Ranking
公开(公告)号：US10060718B2
公开(公告)日：2018-08-28
申请号：US14786218
申请日：2014-04-24
Inventor： Werner Volz
Abstract: A measuring probe for the measurement of the thickness of thin layers, includes a housing, at least one sensor element which is mounted with at least one spring element to be flexible with respect to the housing, the sensor element having a spherical positioning cap pointing towards the measuring surface of an object of measurement against a touchdown direction and along a longitudinal axis thereof, and an attenuating device on the housing which acts in the touchdown direction of the at least one sensor element before the sensor element is fitted onto the measuring surface of the object of measurement and attenuates the touchdown movement of the at least one sensor element in the direction of the measuring surface of the object of measurement.
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公开(公告)号：US09857171B2
公开(公告)日：2018-01-02
申请号：US13066796
申请日：2011-04-25
Applicant: Helmut Fischer
Inventor： Helmut Fischer
Abstract: The invention relates to a measuring probe for non-destructive measuring of the thickness of thin layers on an object with a measuring head, which comprises at least one sensor element for contact on a measurement surface of an object, and with a support device for receiving the measuring head, which is at least partly surrounded by a housing, wherein at least one further measuring head, which is adjacent to and separated from the first measuring head, is arranged on the support device, which can be controlled independently of the first measuring head.
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公开(公告)号：US20160076871A1
公开(公告)日：2016-03-17
申请号：US14786218
申请日：2014-04-24
Inventor： Werner Volz
IPC: G01B7/06
Abstract: The invention relates to a measuring probe for measuring the thickness of thin films, comprising a housing (12) and at least one sensor element (14, 15), which is supported resiliently with respect to the housing (12) by means of at least one spring element (33, 37) and has a contacting spherical cap (31) pointing opposite the contacting direction and along the longitudinal axis (38) of the sensor element toward the measurement surface (25) of a measurement object (26), wherein a damping device (17) is provided on the housing (12), which damping device acts in the contacting direction (28) of the at least one sensor element (14, 15) before the sensor element (14, 15) contacts the measurement surface (25) of the measurement object (26) and damps the contacting motion of the at least one sensor element (14, 15) in the direction toward the measurement surface (25) of the measurement object (26).
Abstract translation: 本发明涉及一种用于测量薄膜厚度的测量探针，其包括壳体（12）和至少一个传感器元件（14,15），该至少一个传感器元件（14,15）至少借助于至少一个壳体 一个弹簧元件（33,37），并且具有与所述传感器元件的所述接触方向相反并且沿着所述传感器元件的纵向轴线（38）朝向测量对象（26）的测量表面（25）指向的接触球形盖（31），其中 阻尼装置（17）设置在所述壳体（12）上，所述阻尼装置在所述传感器元件（14,15）接触所述测量之前在所述至少一个传感器元件（14,15）的接触方向（28）上作用 （26）的表面（25），并且在朝向测量对象（26）的测量表面（25）的方向上减小至少一个传感器元件（14,15）的接触运动。
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9.发明申请OPTICAL MIRROR, X-RAY FLUORESCENCE ANALYSIS DEVICE, AND METHOD FOR X-RAY FLUORESCENCE ANALYSIS 审中-公开光学反射镜，X射线荧光分析装置及其X射线荧光分析方法公开(公告)号：US20150362639A1
公开(公告)日：2015-12-17
申请号：US14761493
申请日：2014-02-27
Inventor： Volker Rossiger
IPC: G02B5/08 , G01B15/02 , G01N23/22 , G01N23/223
CPC classification number: G02B5/0808 , G01B15/02 , G01N23/2206 , G01N23/223 , G01N2223/076
Abstract: The invention relates to an x-ray fluorescence analysis device, comprising an x-ray source (10) for irradiating a sample (15) with x-radiation (19), an x-ray detector (17) for measuring x-ray fluorescence radiation (16) emitted by the sample (15), and a camera (25) for producing an optical control image (26) of the irradiated measurement point (29) of a sample (15) by means of the optical mirror (20) arranged at an angle in the beam path of the x-ray source (10), which optical mirror comprises a carrier (21) having a minor layer (28) provided on the carrier (21). In order to create an x-ray florescence device by means of which realistic control recordings of the sample to be analysed, in particular of the sampled surface point, are possible, the invention provides that the optical minor (20) has a passage window (23) for the x-radiation (19), which is formed by an opening (23) in the carrier (21) and a foil (22) forming the mirror layer (28) and covering the opening (23) on an outer surface of the carrier (21).
Abstract translation: 本发明涉及一种x射线荧光分析装置，包括用于用X射线照射样品（15）的X射线源（10），用于测量x射线荧光的X射线检测器（17） 由样品（15）发射的辐射（16）和用于通过光学镜（20）产生样品（15）的照射测量点（29）的光学控制图像（26）的照相机（25） 在所述X射线源（10）的光束路径中以一定角度布置，所述光学镜包括具有设置在所述载体（21）上的次层（28）的载体（21）。 为了创建一个x射线荧光装置，借助于这种X射线荧光装置，可以对待分析的样品，特别是采样的表面点进行真实的控制记录，本发明提供了光学小调（20）具有通道窗口 23），其由载体（21）中的开口（23）和形成镜层（28）的箔（22）形成并且在外表面上覆盖开口（23）的x辐射（19） 的载体（21）。
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公开(公告)号：US20150316459A1
公开(公告)日：2015-11-05
申请号：US14703914
申请日：2015-05-05
Inventor： Werner Volz , Henry Thiele , Paul Boos
IPC: G01N3/42
Abstract: The invention relates to a device to position and align a rotationally-symmetrical body (28) with respect to a measuring device (19) for the implementation of a measurement on the rotationally-symmetrical body (28), having a basic element (24) which has a contact surface (22) on a pin (23) or is allocated to a contact surface (22) on which the rotationally-symmetrical body (28) is supported for the implementation of the measurement, wherein a positioning element (41) which can be moved relative to the contact surface (22) is provided on the basic element (24), said positioning element (41) comprising a prismatic receiver (64), wherein the contact surface (22) is positioned within the prismatic receiver (64) or abuts on this and a movement path of the positioning element (41) towards the basic element (22) corresponds at least to the height of the prismatic receiver (64).
Abstract translation: 本发明涉及一种将旋转对称体（28）相对于测量装置（19）定位和对准的装置，用于在旋转对称体（28）上执行测量，具有基本元件（24） 其在销（23）上具有接触表面（22）或被分配给接触表面（22），所述旋转对称体（28）被支撑在所述接触表面上，以用于实施所述测量，其中定位元件（41） 所述定位元件（41）包括棱柱形接收器（64），其中所述接触表面（22）位于棱柱形接收器（22）内， 64）或邻接于该位置，并且定位元件（41）朝向基本元件（22）的移动路径至少对应于棱柱形接收器（64）的高度。
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