发明申请
- 专利标题: LPP type extreme ultra violet light source apparatus and driver laser for the same
- 专利标题(中): LPP型极紫外光源装置和驱动激光器相同
-
申请号: US11783387申请日: 2007-04-09
-
公开(公告)号: US20070187628A1公开(公告)日: 2007-08-16
- 发明人: Akira Endo , Tatsuya Ariga , Takashi Suganuma , Taisuke Miura
- 申请人: Akira Endo , Tatsuya Ariga , Takashi Suganuma , Taisuke Miura
- 优先权: JP2004-295272 20041007; JP2005-230619 20050809
- 主分类号: G01J3/10
- IPC分类号: G01J3/10
摘要:
A driver laser for EUV light source apparatus which driver laser simultaneously achieves short-pulsing and multi-line oscillation. The driver laser includes: a short-pulse multi-line oscillated CO2 laser oscillator having a device that shortens width of pulses included in a laser beam to be output and a device that suppresses amplitude of an oscillation spectrum exhibiting an energy peak value; and at least one amplifier that inputs the laser beam output from the short-pulse multi-line oscillated CO2 laser oscillator and amplifies the input laser beam to output the amplified laser beam.
公开/授权文献
信息查询