发明申请
US20070187628A1 LPP type extreme ultra violet light source apparatus and driver laser for the same 有权
LPP型极紫外光源装置和驱动激光器相同

LPP type extreme ultra violet light source apparatus and driver laser for the same
摘要:
A driver laser for EUV light source apparatus which driver laser simultaneously achieves short-pulsing and multi-line oscillation. The driver laser includes: a short-pulse multi-line oscillated CO2 laser oscillator having a device that shortens width of pulses included in a laser beam to be output and a device that suppresses amplitude of an oscillation spectrum exhibiting an energy peak value; and at least one amplifier that inputs the laser beam output from the short-pulse multi-line oscillated CO2 laser oscillator and amplifies the input laser beam to output the amplified laser beam.
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