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    Driver laser for extreme ultra violet light source device
    5.
    发明申请
    Driver laser for extreme ultra violet light source device 审中-公开
    驱动激光器用于极紫外光源装置

    公开(公告)号：US20080069157A1

    公开(公告)日：2008-03-20

    申请号：US11892792

    申请日：2007-08-27

    申请人： Tatsuya Ariga ,  Hideo Hoshino ,  Taisuke Miura ,  Akira Endo

    发明人： Tatsuya Ariga ,  Hideo Hoshino ,  Taisuke Miura ,  Akira Endo

    IPC分类号： H01S3/108

    CPC分类号： H01S3/2308 ,  H01S3/005 ,  H01S3/2232 ,  H01S3/2366 ,  H01S2301/02

    摘要： A driver laser for an extreme ultra violet light source device capable of suppressing self-oscillation light, amplifying a laser beam efficiently, and reducing a device size. The driver laser has an oscillator for generating a laser beam to output the generated laser beam, and at least one amplifier for amplifying the laser beam output from the oscillator to output the amplified laser beam. The amplifier includes a discharge unit which amplifies the laser beam by using energy of a laser medium excited by discharge, a feedback mirror which leads the laser beam output from the discharge unit to the discharge unit, a polarizer which leads the laser beam output from the oscillator into the discharge unit and also reflects the laser beam output from the discharge unit to a predetermined direction, and a self-oscillation light filter which attenuates self-oscillation light output from the discharge unit.

    摘要翻译： 一种能够抑制自振荡的极紫外光源装置的驱动器激光器，有效地放大激光束并减小器件尺寸。 驱动激光器具有用于产生激光束以输出所产生的激光束的振荡器，以及用于放大从振荡器输出的激光束以输出放大的激光束的至少一个放大器。 放大器包括：放电单元，其通过使用通过放电激发的激光介质的能量放大激光束;反射镜，其将从放电单元输出的激光束导引到放电单元;偏振器，其将激光束从 振荡器进入放电单元并且还将从放电单元输出的激光束反射到预定方向，以及自激振荡滤光器，其衰减从放电单元输出的自振荡光。

    Two-stage laser system for aligners
    9.
    发明申请
    Two-stage laser system for aligners 有权
    对准器的两级激光系统

    公开(公告)号：US20070091968A1

    公开(公告)日：2007-04-26

    申请号：US10554537

    申请日：2004-04-16

    申请人： Osamu Wakabayashi ,  Tatsuya Ariga ,  Takahito Kumazaki ,  Kotaro Sasano

    发明人： Osamu Wakabayashi ,  Tatsuya Ariga ,  Takahito Kumazaki ,  Kotaro Sasano

    IPC分类号： H01S3/22 ,  H01S3/093

    CPC分类号： H01S3/2308 ,  G03F7/70025 ,  H01S3/083

    摘要： The invention relates to a two-stage laser system well fit for semiconductor aligners, which is reduced in terms of spatial coherence while taking advantage of the high stability, high output efficiency and fine line width of the MOPO mode. The two-stage laser system for aligners comprises an oscillation-stage laser (50) and an amplification-stage laser (60). Oscillation laser light having divergence is used as the oscillation-stage laser (50), and the amplification-stage laser (60) comprises a Fabry-Perot etalon resonator made up of an input side mirror (1) and an output side mirror (2). The resonator is configured as a stable resonator.

    摘要翻译： 本发明涉及一种适用于半导体对准器的两级激光系统，其在利用MOPO模式的高稳定性，高输出效率和细线宽度的同时，在空间相干性方面被减少。 用于对准器的两级激光系统包括振荡级激光器（50）和放大级激光器（60）。 具有发散的振荡激光用作振荡级激光器（50），放大级激光器（60）包括由输入侧反射镜（1）和输出侧反射镜（2）构成的法布里 - 珀罗标准具共振器 ）。 谐振器被配置为稳定谐振器。

    Two-stage laser pulse energy control device and two-stage laser system
    10.
    发明申请
    Two-stage laser pulse energy control device and two-stage laser system 有权
    两级激光脉冲能量控制装置和两级激光系统

    公开(公告)号：US20060239309A1

    公开(公告)日：2006-10-26

    申请号：US10568091

    申请日：2004-08-09

    申请人： Tatsuya Ariga ,  Osamu Wakabayashi ,  Kouji Kakizaki

    发明人： Tatsuya Ariga ,  Osamu Wakabayashi ,  Kouji Kakizaki

    IPC分类号： H01S3/13 ,  H01S3/00 ,  H01S3/22 ,  H01S3/223

    CPC分类号： G03F7/70041 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/10007 ,  H01S3/104 ,  H01S3/1301 ,  H01S3/134

    摘要： A charging voltage Vosc applied to a main capacitor C0 disposed in an oscillating high-voltage pulse generator 12 of an oscillating laser 100 is subject to constant control such that a pulse energy Posc of the oscillating laser 100 becomes a lower limit energy Es0 or more of an amplification saturation region. And, a charging voltage Vamp applied to a main capacitor C0 disposed in an amplifying high-voltage pulse generator 32 of an amplifying laser 300 is controlled, and pulse energy Pamp of the amplifying laser 300 is determined as target energy Patgt. Thus, the pulse energy of a two-stage laser is controlled to stabilize the pulse energy.

    摘要翻译： 施加到设置在振荡激光器100的振荡高电压脉冲发生器12中的主电容器C 0的充电电压Vosc受到恒定的控制，使得振荡激光器100的脉冲能量Posc成为下限能量Es 0或 更多的是放大饱和区域。 并且，控制施加到放大激光器300的放大高压脉冲发生器32中的主电容器C 0的充电电压Vamp，将放大激光器300的脉冲能量Pamp确定为目标能量Patgt。 因此，控制两级激光器的脉冲能量以稳定脉冲能量。