发明申请
- 专利标题: ULTRA-THIN LOGIC AND BACKGATED ULTRA-THIN SRAM
- 专利标题(中): 超薄逻辑和背面超薄SRAM
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申请号: US11276135申请日: 2006-02-15
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公开(公告)号: US20070187769A1公开(公告)日: 2007-08-16
- 发明人: Brent Anderson , Andres Bryant , William Clark , Edward Nowak
- 申请人: Brent Anderson , Andres Bryant , William Clark , Edward Nowak
- 主分类号: H01L21/337
- IPC分类号: H01L21/337 ; H01L29/94
摘要:
Disclosed are embodiments of a structure that comprises a first device, having multiple FETs, and a second device, having at least one FET. Sections of a first portion of a semiconductor layer below the first device are doped and contacted to form back gates. A second portion of the semiconductor layer below the second device remains un-doped and un-contacted and, thus, functions as an insulator. Despite the performance degradation of the first device due to back gate capacitance, the back gates result in a net gain for devices such as, SRAM cells, which require precise Vt control. Contrarily, despite marginal Vt control in the second device due to the absence of back gates, the lack of capacitance loading and the added insulation result in a net gain for high performance devices such as, logic circuits.
公开/授权文献
- US07494850B2 Ultra-thin logic and backgated ultra-thin SRAM 公开/授权日:2009-02-24
信息查询
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