发明申请
US20070188270A1 FILM BULK ACOUSTIC RESONATOR AND FILM BULK ACOUSTIC RESONATOR FILTER
审中-公开
电影大容量声学谐振器和薄膜音箱谐振器滤波器
- 专利标题： FILM BULK ACOUSTIC RESONATOR AND FILM BULK ACOUSTIC RESONATOR FILTER
- 专利标题（中）： 电影大容量声学谐振器和薄膜音箱谐振器滤波器
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申请号： US11671206申请日： 2007-02-05
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公开(公告)号： US20070188270A1公开(公告)日： 2007-08-16
- 发明人: Ryoichi Ohara , Naoko Yanase , Kenya Sano , Takaaki Yasumoto , Kazuhiko Itaya
- 申请人： Ryoichi Ohara , Naoko Yanase , Kenya Sano , Takaaki Yasumoto , Kazuhiko Itaya
- 申请人地址： JP Tokyo
- 专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人地址： JP Tokyo
- 优先权： JP2006-036029 20060214
- 主分类号： H03H9/58
- IPC分类号： H03H9/58
摘要：
A film bulk acoustic resonator includes: a support substrate; and a laminated body provided on the support substrate, a portion of the laminated body being supported by the support substrate and another portion of the laminated body being spaced from the support substrate. The laminated body includes: a first electrode primarily composed of aluminum; a piezoelectric film laminated on the first electrode and primarily composed of aluminum nitride; and a second electrode laminated on the piezoelectric film. The second electrode is primarily composed of a metal having a density of 1.9 or more times the density of aluminum.