发明申请
- 专利标题: Magnetic-bias ferromagnetic spiral inductor
- 专利标题(中): 磁偏磁铁螺旋电感
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申请号: US11353215申请日: 2006-02-13
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公开(公告)号: US20070188287A1公开(公告)日: 2007-08-16
- 发明人: Wai-Yi Lien , Denny Tang , Wen-Chin Lin , Chao-Hsiung Wang
- 申请人: Wai-Yi Lien , Denny Tang , Wen-Chin Lin , Chao-Hsiung Wang
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 主分类号: H01F5/00
- IPC分类号: H01F5/00
摘要:
A semiconductor device having a semiconductor substrate and a first insulator overlying the semiconductor substrate. A spiral coil inductor overlies the first insulator and a second insulator overlies the spiral coil inductor. A patterned ferromagnetic film overlies the second insulator and a patterned magnetic-bias film overlies the patterned ferromagnetic film.
公开/授权文献
- US07417524B2 Magnetic-bias ferromagnetic spiral inductor 公开/授权日:2008-08-26
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